A Harsh Environment-Oriented Wireless Passive Temperature Sensor Realized by LTCC Technology

Tan, Qiulin; Luo, Tiejian; Xiong, Jijun; Hao, Kun; Ji, Xiaxia; Zhang, Yang; Yang, Ming; Wang, Xiaolong; Chen, Xue; Liu, Jun; Zhang, Wendong

doi:10.3390/s140304154

Cited by 49 publications

(45 citation statements)

References 13 publications

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“…LC sensors were shown previously in lterature to be used as passive wireless sensors at high temperatures, but stability issues with the conductive material still needs to be addressed. The sensors reported in the literature are predominantly fabricated by depositing precious metals such as silver or platinum on ceramic substrate by thick film technology [8][9][10][11][12][13][14]. For example, the sensor presented by E. Birdsell was fabricated from platinum (Pt) onto a ceramic substrate [6].…”

Section: Introductionmentioning

confidence: 99%

“…As with the E. Birdsell work, the dimensions of the reported sensors are large (again, >3 inch in minimum dimension) to integrate with sophisticated systems, such a fuel cell, gasifier, turbine blades, and other micro high temperature systems [6]. An alternate fabrication approach is needed in order to miniaturize the dimension of the sensors to overcome the geometric constraints of the current fabrication approach [8][9][10][11][12][13][14].…”

Section: Introductionmentioning

confidence: 99%

“…In this paper, we also introduce a novel approach for processing the received wireless response from the temperature sensor. The conventional approach is to track changes in the resonant frequency with the expectation that the inductance and/or capacitance of the sensor will change with temperature in a predictable way [8][9][10][11][12][13][14] This requires that the electrical characteristics of the substrate and electrode materials and their interactions can be well modeled as temperatures vary, and that the material properties are stable over many heating and cooling cycles. In practical scenarios, material properties are not known accurately, and they may change (particularly for the wired interconnects) during heating and cooling cycles.…”

Section: Introductionmentioning

confidence: 99%

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Micromachined Ceramic-based Chipless LC Resonator for High-Temperature Wireless Sensing Application in Harsh Environments

Idhaiam

Sabolsky

Redinger

et al. 2020

Preprint

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Abstract The primary objective of this work was the fabrication and testing of a wireless LC resonator based on micro-patterned electroceramic materials for the monitoring of high-temperature systems. The two-dimensional planar LC resonator sensors were designed and simulated using ANSYS Maxwell software, and these sensors were then fabricated from electrically conductive La 2 NiO 4 /Al 2 O 3 particulate inks. The patterning and deposition of the ink were completed using a novel micro-casting process onto Al 2 O 3 ceramic substrates, and the final pattern was bonded onto the substrate at 1200 o C for 2 h. The final patterned materials were characterized using X-ray diffraction (XRD), scanning electron microscope (SEM), and four-point conductivity to characterize the phase and microstructure development, and the resultant electrical conductivity (at 500-1200 o C), respectively. The frequency shift with respect to temperature was measured, which is directly related to changes in the sensor’s dielectric permittivity and pattern dimensions. The sensors were characterized at 500 – 1000 o C in an ambient atmosphere with an RF signal ranging from 10 – 80 MHz at 175 kHz·s -1 sweep rate. A new robust and adaptive signal processing approach was introduced to increase the degree of freedom for analyzing the wireless sensors.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Micromachined Ceramic-based Chipless LC Resonator for High-Temperature Wireless Sensing Application in Harsh Environments

Idhaiam

Sabolsky

Redinger

et al. 2020

Preprint

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“…Wireless passive sensors are promising in harsh environments because they implement battery-free and contactless measurements. Currently, a wireless passive temperature sensor based on inductive-capacitive (LC) resonance could work at 800 °C using high-temperature co-fired ceramic techniques, but the LC lumped circuit suffers from the disadvantage of having a low quality factor and cannot approach the metal material characteristics, which affects the sensing distance and applications [7,8]. Wireless surface acoustic wave temperature sensors could work up to 900 °C, but chemical instabilities in the piezoelectric substrate at high temperatures limit their use in harsh-environment applications [9,10,11].…”

Section: Introductionmentioning

confidence: 99%

Dielectrically-Loaded Cylindrical Resonator-Based Wireless Passive High-Temperature Sensor

Xiong

Tan

et al. 2016

Sensors

Self Cite

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The temperature sensor presented in this paper is based on a microwave dielectric resonator, which uses alumina ceramic as a substrate to survive in harsh environments. The resonant frequency of the resonator is determined by the relative permittivity of the alumina ceramic, which monotonically changes with temperature. A rectangular aperture etched on the surface of the resonator works as both an incentive and a coupling device. A broadband slot antenna fed by a coplanar waveguide is utilized as an interrogation antenna to wirelessly detect the sensor signal using a radio-frequency backscattering technique. Theoretical analysis, software simulation, and experiments verified the feasibility of this temperature-sensing system. The sensor was tested in a metal-enclosed environment, which severely interferes with the extraction of the sensor signal. Therefore, frequency-domain compensation was introduced to filter the background noise and improve the signal-to-noise ratio of the sensor signal. The extracted peak frequency was found to monotonically shift from 2.441 to 2.291 GHz when the temperature was varied from 27 to 800 °C, leading to an average absolute sensitivity of 0.19 MHz/°C.

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“…The sensor can wirelessly detect temperature parameters in harsh environments. However, the sensor can only operate up to 700°C [12].…”

mentioning

confidence: 99%

An Embedded Passive Resonant Sensor Using Frequency Diversity Technology for High-Temperature Wireless Measurement

Tan

Zhang

et al. 2015

IEEE Sensors J.

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This paper presents an embedded wireless passive temperature sensor for measurements in high-temperature applications, such as compressors and turbine engines. The performance of the sensor was improved by optimizing its performance parameters. A high-temperature-resistant material was used, and an embedded structure design was introduced to enable the sensor to operate in high-temperature environments. A series LC resonant circuit containing a fixed inductance coil and variable capacitance that varies with temperature was embedded in an alumina ceramic substrate using high-temperature cofired ceramic technology. The temperature in the high-temperature environment was detected wirelessly via the frequency diversity of the sensor. Furthermore, the experimental results showed that the sensor can measure temperatures ranging from room temperature to 1000°C, and the average sensitivity of the sensor is ∼2 KHz/°C. Index Terms-Wireless measurement, embedded LC resonant sensor, HTCC technology, passive temperature sensor.

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A Harsh Environment-Oriented Wireless Passive Temperature Sensor Realized by LTCC Technology

Cited by 49 publications

References 13 publications

Micromachined Ceramic-based Chipless LC Resonator for High-Temperature Wireless Sensing Application in Harsh Environments

Micromachined Ceramic-based Chipless LC Resonator for High-Temperature Wireless Sensing Application in Harsh Environments

Dielectrically-Loaded Cylindrical Resonator-Based Wireless Passive High-Temperature Sensor

An Embedded Passive Resonant Sensor Using Frequency Diversity Technology for High-Temperature Wireless Measurement

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