A hard x-ray nanoprobe for scanning and projection nanotomography

Bleuet, Pierre; Cloetens, Peter; Gergaud, P.; Mariolle, D.; Chevalier, Nicolas; Tucoulou, R.; Susini, J.; Chabli, Amal

doi:10.1063/1.3117489

Cited by 76 publications

(39 citation statements)

References 29 publications

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“…(3.43) will be referred to as the Fresnel scaling theorem. 8 In other words Ψ ω (r, t ) ∝ E ω (r, t ).…”

Section: Measurement Of Monochromatic Wave Fieldsmentioning

confidence: 99%

“…In the hard x-ray regime e.g. Kirkpatrick-Baez (KB) mirrors [8] are used to provide the illumination for effective near field propagation-based imaging. In the laboratory high-power conventional solid anode [152] as well as liquid jet anode sources [145] can be used for the same application.…”

Section: Effective Near Field Geometry For a Divergent Illuminating Wmentioning

confidence: 99%

“…25,85,137]. Combined with geometric magnification provided by a 'point' source, the resolution can be significantly increased [8,48]. To provide the necessary cone beam illumination, focusing optics, such as reflective mirrors [8] or refractive lenses [128] are applied.…”

Section: Introductionmentioning

confidence: 99%

“…Combined with geometric magnification provided by a 'point' source, the resolution can be significantly increased [8,48]. To provide the necessary cone beam illumination, focusing optics, such as reflective mirrors [8] or refractive lenses [128] are applied. Two-dimensional x-ray waveguides can be used to further decrease the source size [80], enabling a higher numerical aperture of the resulting divergent wave field and thus providing the potential for higher resolution [80], i.e.…”

Section: Introductionmentioning

confidence: 99%

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A study on new approaches in coherent x-ray microscopy of biological specimens

Giewekemeyer¹

2011

Göttingen Series in X-Ray Physics

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“…(3.43) will be referred to as the Fresnel scaling theorem. 8 In other words Ψ ω (r, t ) ∝ E ω (r, t ).…”

Section: Measurement Of Monochromatic Wave Fieldsmentioning

confidence: 99%

Section: Effective Near Field Geometry For a Divergent Illuminating Wmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A study on new approaches in coherent x-ray microscopy of biological specimens

Giewekemeyer¹

2011

Göttingen Series in X-Ray Physics

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“…However, XFM does not usually show much cellular ultrastructure, because the light elements (such as H, C, N, and O, which are the main constituents of biological materials) have low fluorescence yield (4). At the multi-keV X-ray energies needed to excite most X-ray fluorescence lines of interest, these light elements show little absorption contrast, but phase contrast can be used to image cellular structure (5,6) and this can be combined with scanned-beam XFM (7)(8)(9)(10)(11).…”

mentioning

confidence: 99%

Simultaneous cryo X-ray ptychographic and fluorescence microscopy of green algae

Deng

Vine

Chen

et al. 2015

Proc. Natl. Acad. Sci. U.S.A.

163

131

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Trace metals play important roles in normal and in disease-causing biological functions. X-ray fluorescence microscopy reveals trace elements with no dependence on binding affinities (unlike with visible light fluorophores) and with improved sensitivity relative to electron probes. However, X-ray fluorescence is not very sensitive for showing the light elements that comprise the majority of cellular material. Here we show that X-ray ptychography can be combined with fluorescence to image both cellular structure and trace element distribution in frozen-hydrated cells at cryogenic temperatures, with high structural and chemical fidelity. Ptychographic reconstruction algorithms deliver phase and absorption contrast images at a resolution beyond that of the illuminating lens or beam size. Using 5.2-keV X-rays, we have obtained sub-30-nm resolution structural images and ∼90-nm-resolution fluorescence images of several elements in frozen-hydrated green algae. This combined approach offers a way to study the role of trace elements in their structural context. ptychography | X-ray fluorescence microscopy | cryogenic biological samples X -ray fluorescence microscopy (XFM) offers unparalleled sensitivity for quantitative mapping of elements, especially trace metals which play a critical role in many biological processes (1-3). It is complementary to light microscopy, which can study some elemental content in live cells (with superresolution techniques possible) but which is more difficult to quantitate because it depends on the binding affinities of fluorophores. However, XFM does not usually show much cellular ultrastructure, because the light elements (such as H, C, N, and O, which are the main constituents of biological materials) have low fluorescence yield (4). At the multi-keV X-ray energies needed to excite most X-ray fluorescence lines of interest, these light elements show little absorption contrast, but phase contrast can be used to image cellular structure (5, 6) and this can be combined with scanned-beam XFM (7-11).One can also acquire phase-contrast X-ray images with a resolution beyond X-ray lens limits by recording the diffraction pattern from a coherently illuminated, noncrystalline sample in an approach called coherent diffraction imaging (CDI) (12). This approach has been used to image isolated dried cells (13-15), and 3-nm resolution has been achieved when imaging silver nanocubes (16). The traditional CDI approach requires that samples meet a so-called "finite support" (17) requirement with no observable scattering outside of a defined region; although some limited success has been obtained (18,19), this finite support condition has proven difficult to achieve with single cells surrounded by ice layers. Ptychography (20-22) is a recently realized CDI method [with an older history (23)] that circumvents this isolated cell requirement by instead scanning a limitedsize coherent illumination spot across the sample. Ptychography has been used to image freeze-dried diatoms at 30-nm resolution (24) and bacter...

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Devices, Materials, and Processes for Nanoelectronics: Characterization with Advanced X‐Ray Techniques Using Lab‐Based and Synchrotron Radiation Sources

et al. 2011

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Future nanoelectronics manufacturing at extraordinary length scales, new device structures, and advanced materials will provide challenges to process development and engineering but also to process control and physical failure analysis. Advanced X‐ray techniques, using lab systems and synchrotron radiation sources, will play a key role for the characterization of thin films, nanostructures, surfaces, and interfaces. The development of advanced X‐ray techniques and tools will reduce risk and time for the introduction of new technologies. Eventually, time‐to‐market for new products will be reduced by the timely implementation of the best techniques for process development and process control. The development and use of advanced methods at synchrotron radiation sources will be increasingly important, particularly for research and development in the field of advanced processes and new materials but also for the development of new X‐ray components and procedures. The application of advanced X‐ray techniques, in‐line, in out‐of‐fab analytical labs and at synchrotron radiation sources, for research, development, and manufacturing in the nanoelectronics industry is reviewed. The focus of this paper is on the study of nanoscale device and on‐chip interconnect materials, and materials for 3D IC integration as well.

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A hard x-ray nanoprobe for scanning and projection nanotomography

Cited by 76 publications

References 29 publications

A study on new approaches in coherent x-ray microscopy of biological specimens

A study on new approaches in coherent x-ray microscopy of biological specimens

Simultaneous cryo X-ray ptychographic and fluorescence microscopy of green algae

Devices, Materials, and Processes for Nanoelectronics: Characterization with Advanced X‐Ray Techniques Using Lab‐Based and Synchrotron Radiation Sources

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