2008 IEEE Sensors 2008
DOI: 10.1109/icsens.2008.4716683
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A GasFET concept for high temperature operation

Abstract: A new concept for high temperature gas detection with a floating gate field effect transistor (FG-FET) will be presented. The function of the FG-FET is based on measuring work function changes due to an adsorption and desorption process of gas molecules on a sensing film. All existing concepts are working in a temperature range from room temperature up to 200 • C. Higher temperature leads to significant leakage current in the transducer electronics and consequently to device breakdown. The new concept has two … Show more

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Cited by 3 publications
(3 citation statements)
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“…ones assisted by a sterical selectivity mechanism like molecular imprinted polymers (MIPS), zeolites and the newly investigated mesoporous oxides [ 173 ]. The other tendency is research on new variants of the GasFET transducers that will allow operation temperatures above the normal Si-regime [ 174 ]. In the future, this might close the gap between high-temperature operated semiconducting metal oxides and work function devices.…”
Section: Field Effect Sensorsmentioning
confidence: 99%
“…ones assisted by a sterical selectivity mechanism like molecular imprinted polymers (MIPS), zeolites and the newly investigated mesoporous oxides [ 173 ]. The other tendency is research on new variants of the GasFET transducers that will allow operation temperatures above the normal Si-regime [ 174 ]. In the future, this might close the gap between high-temperature operated semiconducting metal oxides and work function devices.…”
Section: Field Effect Sensorsmentioning
confidence: 99%
“…A smart meter used in the conducted tests was electronic three-phase Iskra MT372 meter of accuracy class B. The examined meter enables [9]:…”
Section: Methodsmentioning
confidence: 99%
“…Since then, FET type sensors have been further improved with device structures such as suspended gate and floating gate [6,7]. Due to the narrow energy bandgap of Si, the operating temperature is limited to 200 °C [8]. Higher operating temperatures are frequently necessary to enhance the gas detection properties such as selectivity, sensitivity and response/recovery times.…”
Section: Introductionmentioning
confidence: 99%