“…The micromachined gyroscope is an inertial sensor to measure the angular velocity and angular displacement, which has the advantages of small size, light weight, high reliability [1,2], and having great potential in the fields of military and civilian areas. Resonant tunneling diodes (RTD) is one of the most prospective device in the current nano-electronics field [3], which is a negative resistance device based on tunneling effect of resonant tunneling film, with the advantages of small size, light weight, high reliability, low voltage low power consumption, etc [4,5]. The mesopiezoresistance theory shows that [6,7,8]: the tunneling current of resonant tunneling thin films will be changed when a mechanical signal is applied, that is the I-V characteristic curve will be changed in graphics.…”