A fuzzy scheduling controller for the computer disk file track-following servo

Yen, Jia‐Yush; Wang, F.-J.; Chen, Y.-Y.

doi:10.1109/fuzzy.1993.327375

Cited by 8 publications

(1 citation statement)

References 6 publications

(2 reference statements)

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“…For example, Yen et al 1 designed fuzzy scheduling control to improve hard-disk tracking ability. Zhang et al 2 developed an H N almost disturbance decoupling controller with a tracking differentiator for hard disk drive (HDD) head positioning.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of large-scale micro-structures by two-photon polymerization with a long-stroke precision stage

Wang

Chung

et al. 2017

Advances in Mechanical Engineering

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This article demonstrates the fabrication of large-scale micro-structures by two-photon polymerization with an integrated long-stroke precision stage. We first design a three-axial stage that combines a piezoelectric transducer stage and a stepper-motor stage, and we apply gain-scheduling and robust control with a feedforward compensator to achieve nano-positioning within a travel range of 10 cm. We then integrate the precision stage with a two-photon polymerization module to manufacture large-scale micro-structures, including 1 mm linear gratings, 1 cm parallel lines, and 200 mm Fresnel zone plates. We further define performance indexes to evaluate the qualities of these products: the linear gratings achieve an image error of 4.73%, while the 1 cm lines have an average error of 0.2 mm with a standard deviation of 0.05 mm, and the Fresnel zone plates attain a focal error of 0.4% and a focus efficiency of 64%. These results confirm the effectiveness of the proposed use of the precision stage and two-photon polymerization for large-scale micro-structure manufacturing.

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Section: Introductionmentioning

confidence: 99%