A fully integrated GaAs-based three-axis Hall magnetic sensor exploiting self-positioned strain released structures

Todaro, M. T.; Sileo, Leonardo; Epifani, G.; Tasco, V.; Cingolani, R.; Vittorio, Massimo De; Passaseo, A.

doi:10.1088/0960-1317/20/10/105013

Cited by 10 publications

(4 citation statements)

References 10 publications

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“…Residual stresses usually induce folding or rolling motions, which can produce relatively simple 3D structures. 3D sensors assembled by the residual stress are mainly applied for probing cells, [27,34,132,133] though applications for the detection of gas [22] and magnetic field [134,135] have also been reported.…”

Section: Pre-stored Stressmentioning

confidence: 99%

Review on Microscale Sensors with 3D Engineered Structures: Fabrication and Applications

Zhang

et al. 2022

Small Methods

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they can only perceive portion, along one or two axes, of a stimulus which is normally full of 3D space surrounding the sensors. [10,11] Another limitation is the deficient interface between the 2D sensors and target objects. For instance, health monitoring could be realized by attaching or implanting biomedical sensors to target organs or tissues of the human body. [12] However, it is difficult for traditional 2D sensors to collect accurate vital signals because they cannot conform to the 3D structure of organs or tissues. [13,14] Although this problem can be partially relieved by using flexible 2D sensors, [15] passive adaptation to target objects inevitably results in gaps. [16] Sensors with 3D structures have been developed to overcome these limitations. A 3D cubic sensor generated by selffolding has the ability to gain concentration as well as spatial information (i.e., direction and orientation) of target analytes surrounding the device. [17][18][19] Moreover, a 3D strain sensor fabricated by in situ 3D printing was observed to be compliant with the surface of a breathing porcine lung for continuous mapping of respiration-induced deformation with high 3D spatial resolution. [20] Besides full-space sensing and conformity to targets, compared to 2D counterparts, 3D sensors also possess advantages such as high sensitivity, [21] large specific surface area, [22] multimodal sensing, [23] and so forth.Despite their superiority to 2D sensors, it is challenging to fabricate a sensor with a delicate 3D configuration on a small scale because current micro-nano fabrication technologies are typically performed on planar silicon wafers. [35] Considerable efforts have been made to develop new fabrication methods for 3D sensors, which will be reviewed in this paper. According to the criterion of material quantity change, [36] these fabrication methods are divided into four categories: bulk chemical etching (subtractive manufacturing), 3D printing (additive manufacturing), molding (formative manufacturing), and stress-induced assembly (formative manufacturing), as shown in Figure 1. Basic applications or sensing functions (e.g., light, force, electricity, and chemical/gas), advanced applications (e.g., robotics, HMI, health monitoring, and tissue engineering), and strengths over 2D counterparts (high spatial resolution, multimodality, conformity, and high sensitivity) are illustrated for relevant 3D sensors. The fabrication methods and their pros and cons in generating 3D structures for various applications are summarized in Table 1. The discussions are concluded by outlining current challenges and future opportunities for 3D sensors.The intelligence of modern technologies relies on perceptual systems based on microscale sensors. However, because of the traditional top-down fabrication approaches performed on planar silicon wafers, a large proportion of existing microscale sensors have 2D structures, which severely restricts their sensing capabilities. To overcome these restrictions, over the past few decades, increasing e...

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Section: Pre-stored Stressmentioning

confidence: 99%

Review on Microscale Sensors with 3D Engineered Structures: Fabrication and Applications

Zhang

et al. 2022

Small Methods

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“…Compared to the 2D geometric sensors, the 3D geometric sensors are more suitable for the straightforward measurements of spatially distributed signals. Different geometric shapes have been adopted in the design of 3D sensors . The shapes of 3D sensors are often determined by various factors such as the sensing target, the strength of the source, the purpose of the sensing, and fabrication methods, etc.…”

Section: Man‐made 3d Sensors At Nano/microscalesmentioning

confidence: 99%

Small‐Scale Biological and Artificial Multidimensional Sensors for 3D Sensing

Agarwal

Hwang

Bartnik

et al. 2018

Small

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A vast majority of existing sub-millimeter-scale sensors have a planar, 2D geometry as a result of conventional top-down lithographic procedures. However, 2D sensors often suffer from restricted sensing capability, allowing only partial measurements of 3D quantities. Here, nano/microscale sensors with different geometric (1D, 2D, and 3D) configurations are reviewed to introduce their advantages and limitations when sensing changes in quantities in 3D space. This Review categorizes sensors based on their geometric configuration and sensing capabilities. Among the sensors reviewed here, the 3D configuration sensors defined on polyhedral structures are especially advantageous when sensing spatially distributed 3D quantities. The nano- and microscale vertex configuration forming polyhedral structures enable full 3D spatial sensing due to orthogonally aligned sensing elements. Particularly, the cubic configuration leveraged in 3D sensors offers an array of diverse applications in the field of biosensing for micro-organisms and proteins, optical metamaterials for invisibility cloaking, 3D imaging, and low-power remote sensing of position and angular momentum for use in microbots. Here, various 3D sensors are compared to assess the advantages of their geometry and its impact on sensing mechanisms. 3D biosensors in nature are also explored to provide vital clues for the development of novel 3D sensors.

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“…An integrated three axis Hall sensor based on III-V technology was fabricated by employing a micromachining technique for realizing self positioned structures (Todaro et al, 2010). The MEMS technique was applied to a GaAs-based heterostructure containing a sensing layer and a strained layer.…”

Section: Hall Sensorsmentioning

confidence: 99%

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Todaro¹,

Sileo²,

Vittorio³

2012

Magnetic Sensors - Principles and Applications

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A fully integrated GaAs-based three-axis Hall magnetic sensor exploiting self-positioned strain released structures

Cited by 10 publications

References 10 publications

Review on Microscale Sensors with 3D Engineered Structures: Fabrication and Applications

Review on Microscale Sensors with 3D Engineered Structures: Fabrication and Applications

Small‐Scale Biological and Artificial Multidimensional Sensors for 3D Sensing

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

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