This paper presents electrical beam steering in an integrated 4x4 2D optical phased array (OPA) on a silicon on insulator (SOI) process enabling fast and repeatable beam steering for next generation projection, tracking, and imaging.
IntroductionElectronically steered phased array transmitters and receivers in microwave and mm-wave range have been widely used in radar systems where their agile electronic control enables rapid tracking of multiple fast moving objects [1]. Recently high frequency miniaturized phased array transmitters and receivers have been subject of interest for ranging, imaging, and directional communication at microwave, mm-wave, and THz frequencies [2][3][4]. Optical phased arrays (OPA) based on the same principle at much smaller wavelength have promising prospects for ranging, communications, image projection, optical network switch boxes, free-space optical computation, etc. Since optical wavelengths are much smaller than their RF counterparts, larger number of elements can be integrated on a smaller chip. Recent developments have shown the feasibility of current silicon-based micro-fabrication for integrated OPA implementation [5][6][7][8]. Beam steering can be achieved using thermo-optic phase shifters where the delay for each path is changed via the thermal index change [6,7]. In this approach, the large thermal time constants limit the speed at which the beam can be steered making them unsuitable for real-time and fast applications, such as projection, optical switches, or computing. Thermal crosstalk between adjacent phase shifters presents another challenge to the thermal phase control approach, necessitating remedial action, such as large separation between thermal phase shifters that can limit the number of elements in the OPA. In [6], the second dimension of beam steering is achieved via an external change of the wavelength. MEMS based OPAs [8] overcome the cross talk issue; however, they still have limited operation speed and lower reliability due to limitation of mechanical structures.To overcome the speed and reliability limitations, PIN diode phase shifters that operate based on free carrier injection [9] are used in a 4x4 OPA in this work. Also, some level of amplitude control can be achieved, which provides side-lobe cancellation in the array operation. The utilized PIN-diode-based modulators are capable of operation with time constants under 1 nanosecond, thereby enabling very rapid response.