A Full Automatic On-Wafer High Frequency Measurement Station in Industrial Environment for Silicon Devices

A load-pull wafer-mapper

“…Nevertheless, it is clear that the procedure is still valid in the case where a packaged device is accessed by means of a line on a PCB with SMA-connectors: the only thing one has to change is the calibration kit. 1 Note that the shown gradients are not radial. This is because the wafermaps were in fact taken from a maskset, which was located at the border of a larger SiC-wafer.…”

“…(1) shows that in order to boost in P , we can either reduce in Γ to 0 (input matching), boost avs P or do both. Input-matching would require another (expensive) tuner, and does not guarantee that in P is then high enough to drive the devices in compression.…”

“…For the gathering of all this data, a measurement bench was developed combining a load-pull setup with a semi-automatic wafer-stepper. Automated RFmeasurement setups have already been reported, but either the setup is limited to S-parameters [1], or the report does not mention the mathematical details on the calibration procedures [2,3,4], or there was no focus on the coherence between the obtained data. The added value of the setup is that wafermaps can be obtained.…”

A novel process-controlled-monitor structure suitable for RF CMOS characterization

“…The conventional characterization structure of RF/Microwave devices as shown in Fig.1 (a) is a waste of chip area and is hard to insert into the scribe line due to its specific shape. Carnonero [1] and Sia [2] proposed an improved structure shown in Fig.1 (b) and (c) that can be inserted into the scribe line. But it is suffered from the large inductance that comes from the long metal line.…”

Miniature RF Test Structure for On-Wafer Device Testing and In-Line Process Monitoring

“…In previous literatures [1], [2], the in-line RF test structures have been presented to monitor an RF CMOS process. As shown in Fig.…”