A FCOB packaged thermal wind sensor with compensation

Shen, Guangping; Qin, Ming; Huang, Qing‐An; Zhang, Hua; Wu, Junhua

doi:10.1007/s00542-010-1026-8

Cited by 29 publications

(16 citation statements)

References 13 publications

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“…Wind sensors have been created with thermoresistive technology [58]. Domí nguez et al created a wind sensor for use in Martian atmosphere on a space probe.…”

Section: Thermoresistivementioning

confidence: 99%

Micromachined Thermal Flow Sensors—A Review

2012

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Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

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“…Wind sensors have been created with thermoresistive technology [58]. Domí nguez et al created a wind sensor for use in Martian atmosphere on a space probe.…”

Section: Thermoresistivementioning

confidence: 99%

Micromachined Thermal Flow Sensors—A Review

2012

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“…While such a function has conventionally been carried out using macroscale devices, recent studies have demonstrated the feasibility of developing micro-electro-mechanical system (MEMS)based micro-flow sensors (Bora et al, 2018;Dagamseh et al, 2012;Ganji et al, 2017). Conventional acquisition methods for wind information include the heat flow sensor (Wu et al, 2011), hot-wire anemometer (Shen et al, 2010), ultrasonic wind sensor (Li et al, 2016) and piezoelectric hair flow sensor (Tao et al, 2016). In these papers, the minimum errors of heat flow sensor is 4% (velocity) and 2°(direction), the response time is 1s.…”

Section: Introductionmentioning

confidence: 99%

An investigation to the design of high-precision wind sensing device based on piezoelectric array

Peng

Yao

et al. 2020

Transactions of the Institute of Measurement and Control

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A new wind sensing device based on bimorphs array is designed for apperceiving wind direction and velocity, whose structure is an L-shaped cantilevers array. A coupling model of the array is proposed to predict the response voltage stimulated by wind. By extracting the response voltage ([Formula: see text]) on each bimorph cantilever, the values of wind direction ([Formula: see text]) and velocity ([Formula: see text]) can be calculated in terms of the geometric relation. Further, the relations among wind errors, array amounts ( m) and array radius ( r) are acquired, and m & r can be utilized to decreasing angle error [Formula: see text] and velocity error [Formula: see text] of wind. The calculated and experimental results show that, increasing m initially yields decreasing these two errors, then it begins to increase the errors when m is larger than 6. The minimal wind angle and velocity errors of the array are 0.14° and 0.34%, respectively, at actual wind of 13.4 m/s, m = 6 and r = 20 mm. Meanwhile, increasing r can decrease [Formula: see text] and [Formula: see text], Besides, for calculating 20 random incidence wind angles, respectively, the range of wind velocity error is from 0.34% to 0.87%, the range of wind angle error is from 0.12°to 0.38°, and the response time is 10 ms.

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“…In the case of thermoelectronic sensors, diodes, bi-polar junction transistors (BJT) and field effect transistors (FET) are commonly utilized for temperature sensing. 41 In recent years, numerous works on thermoresistive hot-wire [42][43][44] , hot-film [45][46][47] and calorimetric air flow sensors 17,48,49 have been reported in literature. Nevertheless, design and characterization of thermoresistive air flow sensors for high temperature applications (higher than 150°C) have been rarely reported.…”

Section: Introductionmentioning

confidence: 99%

A hot-film air flow sensor for elevated temperatures

Balakrishnan

Dinh

Nguyen

et al. 2019

Review of Scientific Instruments

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We report for a novel packaging and experimental technique to characterize thermal flow sensors at high temperatures. To start with, the paper briefly presents the fabrication of 3C-SiC (silicon carbide) on a glass substrate via anodic bonding, followed by the study of thermoresistive and Joule heating effects in the 3C-SiC nano-thin film heater. A high thermal coefficient of resistance (TCR) of approximately-20,720 ppm/K at ambient temperature and-9,287 ppm/K at 200°C suggest the potential use of silicon carbide for thermal sensing applications in harsh environments. During the Joule heating test, a high temperature epoxy and a brass metal sheet were utilized to establish the electric conduction between the metal electrodes and the SiC heater inside a temperature oven. In addition, the metal wires from the sensor to external circuitry were protected by a fibre glass insulating sheath to avoid short-circuit. The Joule heating test ensured the mechanical and Ohmic contact stabilities at elevated temperatures. Using a hot-wire anemometer as reference flow sensor, calibration test was performed at 25°C, 35°C and 45°C in the oven. Finally, the SiC hot-film sensor was characterized for a range of low air flow velocity, indicating a sensitivity of 5 mm-1 s. The air flow was established by driving a metal propeller connected to a DC motor and controlled by a microcontroller. The materials, metallization and interconnects used in our flow sensor were robust and survived temperatures of around 200°C.

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A FCOB packaged thermal wind sensor with compensation

Cited by 29 publications

References 13 publications

Micromachined Thermal Flow Sensors—A Review

Micromachined Thermal Flow Sensors—A Review

An investigation to the design of high-precision wind sensing device based on piezoelectric array

A hot-film air flow sensor for elevated temperatures

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