A facile route to thin-film solid state lithium microelectronic batteries

Raffaelle, Ryne P.; Harris, Jerry D.; Hehemann, David G.; Scheiman, David; Rybicki, George C.; Hepp, Aloysius F.

doi:10.1016/s0378-7753(00)00392-x

Cited by 16 publications

(3 citation statements)

References 9 publications

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“…Owing to a high ionic conductivity, LiPON thin films are widely applied in many electrochemical devices such as solid electrolytes, stable protective solid electrolyte interphase films and over layer for all-solid-state rechargeable lithium batteries (Bates et al 1994(Bates et al , 1995(Bates et al , 2000Raffaelle et al 2000;Chung et al 2002Chung et al , 2004Joo et al 2003;West et al 2004;Zhao et al 2005).…”

Section: Introductionmentioning

confidence: 99%

Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Xie

2008

Bull Mater Sci

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Lithium phosphorus oxynitride (LiPON) thin films as solid electrolytes were prepared by radio frequency magnetron sputtering of a Li 3 PO 4 target in ambient nitrogen atmosphere. The influence of radio frequency (rf) power on the structure and the ionic conductivity of LiPON thin films has been investigated. The morphology, composition, structure and ionic conductivity of thin films were characterized by scanning electron microscopy, energy dispersive spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy and a.c. impedance measurement. It was found that ionic conductivity of LiPON thin films increases with N content in thin films. XPS measurements reveal that ionic conductivity also keeps relativity with the structure of thin films. Higher the N t /N d ratio, higher will be the ionic conductivity of LiPON thin films. And both of them can be improved by increasing rf power from 1⋅5 W/cm 2 to 5⋅5 W/cm 2 .

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Section: Introductionmentioning

confidence: 99%

Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Xie

2008

Bull Mater Sci

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“…In addition, a-Ag 2 WO 4 has been prepared as a "composite thin film" (polyvinyl chloride-C-Ag 2 WO 4 ) and used as an electrode (cathode) for possible application in solid-state lithium batteries. Also, a-Ag 2 WO 4 was prepared as a composite coating to be used as a high-temperature solid lubricating material for wear applications [28,67]. The synthesis of b-Ag 2 WO 4 was first reported by Mckechnie et al, in 1979 [68].…”

Section: Synthesis Of the Different Polymorphs Of Ag 2 Wo 4 -Based Ma...mentioning

confidence: 99%

Ag2WO4 as a multifunctional material: Fundamentals and progress of an extraordinarily versatile semiconductor

Gouveia

Roca

Macedo

et al. 2022

Journal of Materials Research and Technology

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“…So far, several power supply methods, such as the microwave [l], solar cells [2] and micro batteries (lithium ion batteries) [3] have been investigated. In this paper, we chose the fuel cell technology because of the following advantages as a MPS.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of micro power source (MPS) using a micro direct methanol fuel cell (μDMFC) for the medical application

Sim

Kim

Yang

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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This paper presents the fabrication and test of a micro power source (MPS) using a micro direct methanol fuel cell (pDMFC). Micro power sources are essential for cellular phones, portable electronics and MEMS devices to be miniaturized. The WMFC has a simple structure. The pDMFC consists of one proton exchange membrane (PEM) and two silicon substrates with channels. The width and the depth of the micro channel are 250 pn and 50 pm, respectively. The dimension of one unit of pDMFC is 16 mm x 16 mm x 1.2 mm. When fuel (methanol : water = 1 : 1) is supplied to the fabricated cell, the measured output voltage is 100 mV at 25 OC and the atmospheric pressure.

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A facile route to thin-film solid state lithium microelectronic batteries

Cited by 16 publications

References 9 publications

Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Ag2WO4 as a multifunctional material: Fundamentals and progress of an extraordinarily versatile semiconductor

Fabrication of micro power source (MPS) using a micro direct methanol fuel cell (μDMFC) for the medical application

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