This paper presents the fabrication and test of a micro power source (MPS) using a micro direct methanol fuel cell (pDMFC). Micro power sources are essential for cellular phones, portable electronics and MEMS devices to be miniaturized. The WMFC has a simple structure. The pDMFC consists of one proton exchange membrane (PEM) and two silicon substrates with channels. The width and the depth of the micro channel are 250 pn and 50 pm, respectively. The dimension of one unit of pDMFC is 16 mm x 16 mm x 1.2 mm. When fuel (methanol : water = 1 : 1) is supplied to the fabricated cell, the measured output voltage is 100 mV at 25 OC and the atmospheric pressure.

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This paper presents the fabrication and test of a thermnopneumatic micropump without membrane for transdermal drug delivery systems (DDS). A micropump consists of two air chambers, a microchannel and a stop valve. The air chambers have ohmic heaters on the Pyrex glass substrate. They can be achieved by the precise control of the drug delivery amount. The micropump is fabricated by the spin-coating process, the lithograph process, the molding process and etc. The total size of micropump and the resistance of the micro heater are 13 x 9 mm2 and 690 Q, respectively. The meniscus motion in the microchannel is ovserved with a high speed camera and discharge volume of the micropump is calculated through the frame analysis of the recorded video data.Each discharge volumes are 0.1 Al/for 3 sec at 15 V and 0.1 /i/for 1.8 sec at 20 V.