A dynamic indentation method for characterizing soft incompressible viscoelastic materials

Yin, Yue; Ling, Shih‐Fu; Liu, Yong

doi:10.1016/j.msea.2004.02.055

Cited by 23 publications

(30 citation statements)

References 13 publications

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“…In this work, only one set of testing frequency and load amplitude is discussed, since they have no significant influence on the dynamic properties. This phenomenon agrees with other reports [4,6].…”

Section: Dynamic Mechanical Analysissupporting

confidence: 94%

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Dynamic mechanical properties of photo resist thin films

2007

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Photo resist thin films have mainly been used and investigated for versatile applications of micro electronic mechanical systems because of its outstanding aspect ratio and attainable film thickness. An accurate structure properties derived from validated material characterization is required in engineering applications. In this work, dynamic responses of photo resist thin films are tested by a nanoindentation in association with a dynamic mechanical analysis, where the thin film is coated on a silicon wafer by spin coating. The results show that the storage modulus of the photo resist thin film remains constant at the beginning and then increases as the indentation depth increases. Meanwhile, the loss modulus increases as the indentation depth increases. Varying the film thickness shows that the substrate effect plays an important role in determining the dynamic properties of thin films. However, the results agree well with the bulk material when the amplitude of nanoindentation is relatively small. It illustrates the dynamic mechanical analysis can be an efficient method to characterize the viscoelastic properties of thin films, but proper attention on the test parameters is needed.

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Section: Dynamic Mechanical Analysissupporting

confidence: 94%

“…[4] used a shaker to exert dynamic indentation to the specimen. From the detected mechanical impedance, the complex modulus of the testing specimen was then deduced by using a viscoelastic model.…”

Section: Fabrication Of Photo Resist Thin Filmsmentioning

confidence: 99%

Dynamic mechanical properties of photo resist thin films

2007

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“…In recent years, indentation tests have been conducted on rubber-like elastomeric materials [23,[26][27][28][29][30][31][32]. For example, Lim and Chaudhri [28] reported the study on applying the indentation on elastic solids including rubber materials using rigid cones.…”

Section: Introductionmentioning

confidence: 99%

Assessment of mechanical properties of fluoroelastomer and EPDM in a simulated PEM fuel cell environment by microindentation test

Tan

Chao

Zee

et al. 2008

Materials Science and Engineering: A

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“…(2), it shows that the Z m can be correlated with the Z E when the piezoelectric accelerometer is a linear system. This has been proven by applying superposition and reciprocal theorems for the study of piezoelectric sensor [15]. Therefore, the Z m can be determined conveniently since the Z E is easy to measure.…”

Section: Page 5 Of 25mentioning

confidence: 99%