A double heater integrated gas flow sensor with thermal feedback

Bruschi, P.; Diligenti, A.; Navarrini, D.; Piotto, M.

doi:10.1016/j.sna.2005.04.023

Cited by 53 publications

(37 citation statements)

References 8 publications

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“…Two thermally isolated heaters instead of one were used in between two thermopiles and thermal feedback maintained equal temperature between the two heaters under varying flow conditions [84][85][86].…”

Section: Thermoelectricmentioning

confidence: 99%

Micromachined Thermal Flow Sensors—A Review

2012

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Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

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Section: Thermoelectricmentioning

confidence: 99%

Micromachined Thermal Flow Sensors—A Review

2012

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“…The basic operating principle of the sensor is simple: as the flow progressively increases, heat transfer in the downwind direction increases as well, producing a temperature difference that is sensed by the thermopiles. The typical configuration includes a single heater whereas multi-heater structures can be used to perform particular functions [17,[22][23][24] or simply extend the effective heater area with no adverse consequences on the etching time required to release the suspending membranes. Possible alternatives to the structure shown in Figure 1(a) are often used.…”

Section: Description Of the Sensor Structure And Main Performance Parmentioning

confidence: 99%

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Bruschi

Piotto

2012

Micromachines

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Flow sensors are the key elements in most systems for monitoring and controlling fluid flows. With the introduction of MEMS thermal flow sensors, unprecedented performances, such as ultra wide measurement ranges, low power consumptions and extreme miniaturization, have been achieved, although several critical issues have still to be solved. In this work, a systematic approach to the design of integrated thermal flow sensors, with specification of resolution, dynamic range, power consumption and pressure insertion loss is proposed. All the critical components of the sensors, namely thermal microstructure, package and read-out interface are examined, showing their impact on the sensor performance and indicating effective optimization strategies. The proposed design procedures are supported by experiments performed using a recently developed test chip, including several different sensing structures and a flexible electronic interface.

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“…The simplest solution is that of placing the whole chip, including the bonding wires, inside a channel where the fluid is made to flow (Yoon and Wise 1992;Mayer et al 1995;Kaltsas et al 2002;Bruschi et al 2005). Clearly, this is not applicable to liquid flows, due to the exposed pads and bonding wires.…”

Section: Introductionmentioning

confidence: 99%

A compact package for integrated silicon thermal gas flow meters

2008

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An original packaging method suitable for\ud integrated thermal mass flow sensors is presented. The\ud method is based on a polymethyl-methacrylate (PMMA)\ud adapter, used to convey the fluid flow to the chip areas\ud where the sensing structures are located. Sealing of the\ud adapter was obtained by heating the chip itself to the PMMA\ud glass transition temperature, in order to soften the adapter\ud front surface and improve adhesion. The proposed approach\ud was applied to the packaging of thermal flow meters\ud obtained by post-processing standard integrated circuits.\ud The resulting compact devices have been characterized by\ud measuring the response to a nitrogen flow. Fabrication and\ud testing of a very compact flow sensor is described

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A double heater integrated gas flow sensor with thermal feedback

Cited by 53 publications

References 8 publications

Micromachined Thermal Flow Sensors—A Review

Micromachined Thermal Flow Sensors—A Review

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

A compact package for integrated silicon thermal gas flow meters

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