A dome-shaped piezoelectric tactile sensor arrays fabricated by an air inflation technique

Kim, Myoung Soo; Ahn, Hye Rin; Lee, Seok; Kim, Chulki; Kim, Yong Jun

doi:10.1016/j.sna.2014.02.023

Cited by 57 publications

(46 citation statements)

References 17 publications

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“…The equation of motion of a PZT can be defined by using a second order differential equation with a mass, m p , spring, k p , and a damper, b p [22]. So the equilibrium of forces for the PZT embedded in silicone (see figure 4(b)) can be written as:…”

Section: Pzt Sensor Physical Modeling Embedded In Siliconementioning

confidence: 99%

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Development and characterization of silicone embedded distributed piezoelectric sensors for contact detection

Acer

Salerno

Agbeviade

et al. 2015

Smart Mater. Struct.

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Tactile sensing transfers complex interactive information in a most intuitive sense. Such a populated set of data from the environment and human interactions necessitates various degrees of information from both modular and distributed areas. A sensor design that could provide such types of feedback becomes challenging when the target component has a nonuniform, agile, high resolution, and soft surface. This paper presents an innovative methodology for the manufacture of novel soft sensors that have a high resolution sensing array due to the sensitivity of ceramic piezoelectric (PZT) elements, while uncommonly matched with the high stretchability of the soft substrate and electrode design. Further, they have a low profile and their transfer function is easy to tune by changing the material and thickness of the soft substrate in which the PZTs are embedded. In this manuscript, we present experimental results of the soft sensor prototypes: PZTs arranged in a four by two array form, measuring 1.5-2.3 mm in thickness, with the sensitivity in the range of 0.07-0.12 of the normalized signal change per unit force. We have conducted extensive tests under dynamic loading conditions that include impact, step and cyclic. The presented prototype's mechanical and functional capacities are promising for applications in biomedical systems where soft, wearable and high precision sensors are needed.

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Section: Pzt Sensor Physical Modeling Embedded In Siliconementioning

confidence: 99%

“…In order to take advantage of its high flexibility, polyvinylidene fluoride (PVDF) is one of the most commonly used sensitive piezoelectric polymers [19][20][21][22]. Typical polymeric piezoelectric tactile sensors consist of a single PVDF layer with multiple electrodes.…”

Section: Introductionmentioning

confidence: 99%

Development and characterization of silicone embedded distributed piezoelectric sensors for contact detection

Acer

Salerno

Agbeviade

et al. 2015

Smart Mater. Struct.

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“…Kim et al [30] fabricated a dome-shaped piezoelectric tactile sensor (Figure 14) with films of 56

sans-serifμ normalm

-thick PVDF whose achieved sensitivity can reach values up to 8830

normalm normalV N^{- 1}

(according to the geometry and curvature of domes), showing an increase of about 46% of the sensitivity compared to the conventional flat counterpart.…”

Section: Results and Applicationsmentioning

confidence: 99%

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Abels

Mastronardi

Guido

et al. 2017

Sensors

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The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, SixNy/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.

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“…The design principle for tactile sensors developed with different tactile-sensing mechanisms mainly concentrate on piezoelectricity [1,2], capacitance [3,4,5,6], optical fiber [7,8,9], single-walled carbon nanotube [10] technology, and so forth. For most of the tactile sensors, their sensing surface is divided into scattered areas without a continuous elastomer skin, and the sensing units are usually independent of each other.…”

Section: Introductionmentioning

confidence: 99%

Decoupling Research of a Novel Three-Dimensional Force Flexible Tactile Sensor Based on an Improved BP Algorithm

2018

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Decoupling research on flexible tactile sensors play a very important role in the intelligent robot skin and tactile-sensing fields. In this paper, an efficient machine learning method based on the improved back-propagation (BP) algorithm is proposed to decouple the mapping relationship between the resistances of force-sensitive conductive pillars and three-dimensional forces for the 6 × 6 novel flexible tactile sensor array. Tactile-sensing principles and numerical experiments are analyzed. The tactile sensor array model accomplishes the decomposition of the force components by its delicate structure, and avoids direct interference among the electrodes of the sensor array. The force components loaded on the tactile sensor are decoupled with a very high precision from the resistance signal by the improved BP algorithm. The decoupling results show that the k-cross validation (k-CV) algorithm is a highly effective method to improve the decoupling precision of force components for the novel tactile sensor. The large dataset with the k-CV method obtains a better decoupling accuracy of the force components than the small dataset. All of the decoupling results are fairly good, and they indicate that the improved BP model with a strong non-linear approaching ability has an efficient and valid performance in decoupling force components for the tactile sensor.

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A dome-shaped piezoelectric tactile sensor arrays fabricated by an air inflation technique

Cited by 57 publications

References 17 publications

Development and characterization of silicone embedded distributed piezoelectric sensors for contact detection

Development and characterization of silicone embedded distributed piezoelectric sensors for contact detection

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Decoupling Research of a Novel Three-Dimensional Force Flexible Tactile Sensor Based on an Improved BP Algorithm

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