A digital-alloy AlGaAs/GaAs distributed Bragg reflector for application to surface emitting laser diodes

Cho, N.K.; Kim, K.W.; Song, Jin Dong; Choi, Won Jun; Lee, J.I.

doi:10.1016/j.ssc.2010.05.010

Cited by 3 publications

(2 citation statements)

References 13 publications

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“…DBRs are fabricated using many different techniques. For instance, they can be deposited by radio-frequency magnetron sputtering, , plasma-enhanced chemical vapor deposition (PECVD), laser-induced vapor deposition, and molecular beam epitaxy (MBE) . These techniques are based on high-energy processes that allow us to obtain highly uniform and dense layers, thus ensuring high reflectivity.…”

Section: Introductionmentioning

confidence: 99%

“…For instance, they can be deposited by radio-frequency magnetron sputtering, 32,33 plasma-enhanced chemical vapor deposition (PECVD), 45 laser-induced vapor deposition, 46 and molecular beam epitaxy (MBE). 47 These techniques are based on highenergy processes that allow us to obtain highly uniform and dense layers, thus ensuring high reflectivity. Nevertheless, such kinds of deposition techniques are not compatible with organic active materials and some kind of nanomaterials (e.g., transition-metal dichalcogenide monolayersTMD), which could be damaged by the aforementioned processes.…”

Section: Introductionmentioning

confidence: 99%

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Highly Reflective Periodic Nanostructure Based on Thermal Evaporated Tungsten Oxide and Calcium Fluoride for Advanced Photonic Applications

Pugliese

Prontera

Polimeno

et al. 2020

ACS Appl. Nano Mater.

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In this paper, we report the fabrication and characterization of high-quality distributed Bragg reflectors (DBRs) deposited by low-energetic thermal evaporation. This technique allows deposition of high-quality thin films with an accurate control of thickness at the nanoscale. We investigated, for the first time, the use of tungsten oxide (WO3) and calcium fluoride (CaF2) as high (2.15) and low (1.4) refractive index materials, respectively, for DBR fabrication. They consist of nine pairs of WO3/CaF2 layers, with a central wavelength λc tuned at 640 nm and a maximum reflectance of 99.6%. A passive microcavity consisting of a λ/2 thick spacer of CaF2 sandwiched between 8.5 pairs of WO3/CaF2 has also been fabricated. We investigated the optical behavior of this microresonator after post-deposition thermal treatment at different temperatures, showing a blue shift of the resonant mode and an increase in its intensity. Indeed, heat treatment induced a compaction of the DBR multilayer, leading to more defined and clearer interfaces, as demonstrated by scanning electron microscopy cross section measurements. This behavior results in an improvement of the microcavity quality factor (up to 400) as the temperature increases, which is currently the highest value obtained for microcavities obtained by thermal evaporation processes, so far. These results represent a further step forward toward the development of high-reflectivity mirrors and high-quality microresonators fabricated by the low-energy deposition technique. Such a structure could find extensive application in nano-photonics, optoelectronics, and sensors, even based on soft organic materials.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Highly Reflective Periodic Nanostructure Based on Thermal Evaporated Tungsten Oxide and Calcium Fluoride for Advanced Photonic Applications

Pugliese

Prontera

Polimeno

et al. 2020

ACS Appl. Nano Mater.

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Artifact-free secondary ion mass spectrometry profiling of a full vertical cavity surface emitting laser structure

Michałowski,

Gębski,

Śpiewak

et al. 2024

Measurement

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Direct-write projection lithography of quantum dot micropillar single photon sources

Androvitsaneas,

Clark,

Jordan

et al. 2023

Applied Physics Letters

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We have developed a process to mass-produce quantum dot micropillar cavities using direct-write lithography. This technique allows us to achieve mass patterning of high-aspect ratio pillars with vertical, smooth sidewalls maintaining a high quality factor for diameters below 2.0 μm. Encapsulating the cavities in a thin layer of oxide (Ta2O5) prevents oxidation in the atmosphere, preserving the optical properties of the cavity over months of ambient exposure. We confirm that single dots in the cavities can be deterministically excited to create high-purity indistinguishable single photons with interference visibility (0.941 ± 0.008).

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A digital-alloy AlGaAs/GaAs distributed Bragg reflector for application to surface emitting laser diodes

Cited by 3 publications

References 13 publications

Highly Reflective Periodic Nanostructure Based on Thermal Evaporated Tungsten Oxide and Calcium Fluoride for Advanced Photonic Applications

Highly Reflective Periodic Nanostructure Based on Thermal Evaporated Tungsten Oxide and Calcium Fluoride for Advanced Photonic Applications

Artifact-free secondary ion mass spectrometry profiling of a full vertical cavity surface emitting laser structure

Direct-write projection lithography of quantum dot micropillar single photon sources

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