Artifact-free secondary ion mass spectrometry profiling of a full vertical cavity surface emitting laser structure

Michałowski, Paweł Piotr; Gębski, Marcin; Śpiewak, Patrycja; Kołkowski, Walery; Pasternak, Iwona; Głowadzka, Weronika; Wasiak, Michał; Czyszanowski, Tomasz; Strupiński, Włodzimierz

doi:10.1016/j.measurement.2023.114003

Measurement

2024

DOI: 10.1016/j.measurement.2023.114003

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Artifact-free secondary ion mass spectrometry profiling of a full vertical cavity surface emitting laser structure

Paweł Piotr Michałowski,

Marcin Gębski,

Patrycja Śpiewak

et al.

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Artifact-free secondary ion mass spectrometry profiling of a full vertical cavity surface emitting laser structure

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References 35 publications

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