A digital accelerometer using a microscale liquid-metal droplet in photosensitive glass channel

Yoo, Kwanghyun; Lee, Chan; Kim, Joonwon

doi:10.1109/sensor.2009.5285415

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Introduction1

Non Solid-state Motion Sensors1

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2011

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Cited by 2 publications

(2 citation statements)

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“…To simplify device fabrication and to prevent mechanical fatigue, the MDA employs a microscale liquid metal droplet as a proof-mass and measures acceleration using the movement of the liquid metal droplet in the device channel. This sensing mechanism has been reported previously [10,11]. Photosensitive glass can be easily definable using ultraviolet (UV) light; this property simplifies fabrication of a channel with the desired shape and internal microstructured surface.…”

Section: Introductionsupporting

confidence: 57%

Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Park

Yoo

Kim

2010

Sensors and Actuators A: Physical

Self Cite

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Section: Introductionsupporting

confidence: 57%

Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Park

Yoo

Kim

2010

Sensors and Actuators A: Physical

Self Cite

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“…A similar approach is to measure the external acceleration based on the motion of a microscale liquid-metal (LM) droplet [ 69 ]. The concept is shown in Figure 11(a) .…”

Section: Non Solid-state Motion Sensorsmentioning

confidence: 99%

Sensing Movement: Microsensors for Body Motion Measurement

Zeng

Zhao

2011

Sensors

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Recognition of body posture and motion is an important physiological function that can keep the body in balance. Man-made motion sensors have also been widely applied for a broad array of biomedical applications including diagnosis of balance disorders and evaluation of energy expenditure. This paper reviews the state-of-the-art sensing components utilized for body motion measurement. The anatomy and working principles of a natural body motion sensor, the human vestibular system, are first described. Various man-made inertial sensors are then elaborated based on their distinctive sensing mechanisms. In particular, both the conventional solid-state motion sensors and the emerging non solid-state motion sensors are depicted. With their lower cost and increased intelligence, man-made motion sensors are expected to play an increasingly important role in biomedical systems for basic research as well as clinical diagnostics.

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A digital accelerometer using a microscale liquid-metal droplet in photosensitive glass channel

Cited by 2 publications

References 12 publications

Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Sensing Movement: Microsensors for Body Motion Measurement

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