A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology

Yamane, Daisuke; Konishi, Toshifumi; Safu, Teruaki; Toshiyoshi, Hiroshi; Sone, Masato; Masu, Kazuya; Machida, Katsuyuki

doi:10.1109/nems.2016.7758281

Cited by 7 publications

(8 citation statements)

References 4 publications

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“…Figure 1 shows a schematic view of typical CMOS-MEMS and MEMS accelerometers (21)(22)(23)(24). The MEMS accelerometer consists of suspensions, stoppers, a proof mass as upper electrode, and a fixed electrode.…”

Section: Design Conceptmentioning

confidence: 99%

“…BN of MEMS accelerometer fabricated by surface micromachined technology cannot exhibit the lower value than 10μG/√Hz (18)(19)(20). In order to realize the high sensitivity, we have proposed capacitive MEMS accelerometers with high-density proof mass and have been developing CMOS-MEMS and MEMS accelerometers (21)(22)(23)(24) using a post-CMOS process compatible to CMOS LSI process (25).…”

Section: Introductionmentioning

confidence: 99%

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(Invited) CMOS-MEMS Based Microgravity Sensor and Its Application

et al. 2020

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This paper reviews the feature of newly developed CMOS-MEMS (microelectromechanical systems) and MEMS accelerometers and its application for a diagnosis of Parkinson’s disease. In order to realize micro-G (1G=9.8m/s2) level sensing, we propose and develop capacitive MEMS accelerometers with Au proof mass using the multi-layer metal technology. In order to reduce Brownian noise (BN), which determines the sensitivity of MEMS accelerometer, we utilize Au as a high density proof mass. In addition, we investigate the crystal structure of Au in terms of the device reliability. Furthermore, we demonstrate the validity of applying the MEMS accelerometer for the early-stage diagnosis of Parkinson’s disease. The experimental results regarding the sensor, the material and the diagnosis suggest that our microgravity sensor can pave the new way for the early-stage diagnosis of Parkinson’s disease.

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Section: Design Conceptmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

(Invited) CMOS-MEMS Based Microgravity Sensor and Its Application

et al. 2020

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“…Kaya et al [41] and Petsch and Kaya [42] numerically studied the dynamic behavior of serpentine springs with variable lengths mounted at 45 degrees in an accelerometer. Yamane et al [43] analyzed the spring constant of a serpentine beam in the z direction to suspend the high-density proof mass of an accelerometer. Guo et al [44] determined the stiffness of a curve serpentine spring in the form of an S-shape in a three-axis gyroscope.…”

Section: Introductionmentioning

confidence: 99%

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Rahbar Ranji,

Li,

Alirezaee

et al. 2023

Eng. Res. Express

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Accurate estimation of the mechanical behavior of springs is crucial for the proper design of Microelectormechanical systems (MEMS). The main objective of this study is to derive a closed-form equation for the calculation of the stiffness of an inclined spring in the form of folded beams. The energy-based method was used to calculate the displacements of a folded beam that was fixed at one end and giuded at the other end. The analytical model was then compared with the finite element method using ANSYS for different inclination angles of the folded beam spring, showing good agreement. The angle on inclination has changed from zero to 180 degress, and stiffness of folded beam is detemined. The derived expressions of the compliances were checked for the case of serpentine springs with inclination angle of zero, and different length ratios against the literature. It is found that neglecting small lengths for calculating the stiffness of the folded beam spring is not justified. The influential geometrical parameters, including different lengths of the spring and inclination angle of the spring, on the stiffness are studied. It is found that the angle of inclination of the principal axes of spring constants depends on the geometrical parameters, and the angle of inclination has more effect on the stiffness of a folded beam spring than the number of folds.

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“…6) In order to achieve low Brownian noise, MEMS accelerometers have large size in conventional silicon (Si)-based MEMS accelerometers. [7][8][9][10][11][12][13][14][15][16] To achieve high resolution and small sensor size using gold as the proof mass material, we proposed and developed a capacitive gold proof-mass MEMS accelerometer using the multi-layer metal technology, [17][18][19][20] because the density of gold (19.3 g cm −3 ) is approximately 10 times higher than that of Si (2.3 g cm −3 ). As a result, we can realize a MEMS accelerometer with the Brownian noise of less than 200 nG/√Hz.…”

Section: Introductionmentioning

confidence: 99%

Suppressed drift and low-noise sensor module with a single-axis gold proof-mass MEMS accelerometer for micro muscle sound measurement

Onishi

Shibata

Uchiyama

et al. 2022

Jpn. J. Appl. Phys.

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This paper describes a highly sensitive microelectromechanical systems (MEMS) accelerometer sensor module to measure micro muscle sounds. Regarding the drift mechanism, we focus on charged particles based on residual water related to MEMS fabrication. Based on temperature programmed desorption (TPD) analysis and electrical experiments, it is clarified that the drift is caused by negatively charged OH− and is suppressed by vacuum packaging. The noise floor can be reduced by the improved sensitivity of the MEMS accelerometer. The developed MEMS accelerometer can realize the sensitivity of 1157.0 fF/G and Brownian noise of 149.0 nG/√Hz. The developed sensor module consisting of the developed MEMS accelerometer and the capacitance to digital converter (CDC) can achieve a noise floor of 26.7 μG/√Hz without any obvious drifts, establishing the target value of less than 50 μG/√Hz. Therefore, it is confirmed that the developed sensor module can detect micro muscle sounds without contracting a muscle in the frequency range of 20–40 Hz.

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A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology

Cited by 7 publications

References 4 publications

(Invited) CMOS-MEMS Based Microgravity Sensor and Its Application

(Invited) CMOS-MEMS Based Microgravity Sensor and Its Application

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Suppressed drift and low-noise sensor module with a single-axis gold proof-mass MEMS accelerometer for micro muscle sound measurement

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