Suppressed drift and low-noise sensor module with a single-axis gold proof-mass MEMS accelerometer for micro muscle sound measurement

Onishi, Akira; Shibata, Kohei; Uchiyama, Akihiro; Machida, Katsuyuki; Ogata, Taiki; Ishihara, Noboru; Uchitomi, Hirotaka; Chang, Tso-Fu Mark; Sone, Masato; Miyake, Yoshihiro; Ito, Hiroyuki

doi:10.35848/1347-4065/ac5b25

Cited by 11 publications

(5 citation statements)

References 31 publications

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“…We have developed a highresolution CMOS-MEMS capacitive accelerometer consisting of a gold proof-mass, spring, fixed electrode, and CMOS LSI. [17][18][19][20][21] When designing a high sensitivity MEMS capacitive accelerometer, there are two key parameters that determine performance: Brownian noise B N and sensitivity S m . First, Brownian noise B N determines the resolution of MEMS capacitive accelerometers.…”

Section: Introductionmentioning

confidence: 99%

Serpentine spring design technique for high sensitivity MEMS capacitive accelerometer fabricated by gold multi-layer metal technology

Miyado,

Tenneti,

Onishi

et al. 2024

Jpn. J. Appl. Phys.

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This paper describes a design technique for serpentine spring with the edge span beam L/2. In order to improve design accuracy, we investigate the key structure parameters influenced by the fabrication process for MEMS device, comparing FEA (finite element analysis) and analytical models. It is found that the Fedder model as the analytical model is suitable for the spring constant characteristics of FEA with the edge span beam L/2. Further, the thickness and width are found to be the key structure parameters and the dominant factor of variation regarding the serpentine spring. Based on the analysis, we propose a spring design technique. The experimental results show that the variation between the measured data of 4.46 N/m and the design value of 4.15 N/m was 7.5%, satisfying the target of ±10%. It is confirmed that the proposed technique can establish the serpentine spring for high sensitivity gold proof-mass MEMS accelerometers.

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Section: Introductionmentioning

confidence: 99%

Serpentine spring design technique for high sensitivity MEMS capacitive accelerometer fabricated by gold multi-layer metal technology

Miyado,

Tenneti,

Onishi

et al. 2024

Jpn. J. Appl. Phys.

Self Cite

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“…A MEMS accelerometer is an inertial navigation device which combines microelectronics and micro-machining technology. It is widely applied to various fields, such as aerospace [ 1 , 2 ], autonomous driving [ 3 ], oil exploration [ 4 ], and medical devices [ 5 , 6 ]. A capacitive accelerometer is a typical MEMS accelerometer because of the outstanding performance of small volume, low power consumption, high resolution, and wide dynamic range, etc.…”

Section: Introductionmentioning

confidence: 99%

Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers

Huang

Dong

et al. 2023

Micromachines

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During long-term use, MEMS accelerometers will experience degradation, such as bias and scale factor changes. Bias of MEMS capacitive accelerometers usually comes from the mismatch of parasitic capacitance and sensitive capacitance. This paper focuses on the mismatch of sensitive capacitance and analyzes the mechanism of long-term degradation of MEMS accelerometers. Firstly, the effect of sensitive capacitance mismatch on the performance of a MEMS accelerometer was investigated. Secondly, a method of measuring the mismatch of sensitive capacitance was proposed, and the validation experiment shows that the accuracy of this measurement can be less than 1.10×10−5 of the sensitive capacitance. For the samples in this experiment, the measurement error of this method can be less than 0.36 fF. Finally, a high-temperature acceleration experiment was performed. The mismatch of the sensitive capacitance during the experiment was monitored based on the proposed method, and the experimental results are analyzed. The experimental result demonstrates that the mismatch of sensitive capacitance varies linearly with time. The change rates of sensitive capacitance mismatch for the two samples are 2.95×10−7 C0/h and 2.66×10−7 C0/h in the high-temperature acceleration experiment at 145 °C, respectively. The change in sensitive capacitance mismatch seems small, but it is not to be ignored during long-term use. The rate of change is similar for the same batch of samples. This could imply that the adverse effects due to the mismatch of sensitive capacitance changes can be reduced by compensating for this variation.

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“…Among them, the silicon MEMS accelerometer based on silicon material is an important inertial sensor used to measure the acceleration of objects. Silicon MEMS capacitive accelerometer has gradually become the mainstream of MEMS accelerometer development because of its advantages of low noise, low power consumption, high precision, low-temperature sensitivity, and simple fabrication [4,5] .…”

Section: Introduction Mems (Micro Electro Mechanical Systemsmentioning

confidence: 99%

A Pseudo-Differential Capacitive MEMS Accelerometer Analog Front-End Design

Kong

Duan

2023

J. Phys.: Conf. Ser.

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Based on the current design and application of the chip and the research status at home and abroad, we proposed a silicon micro-accelerometer analog front-end integrated circuit with high resolution and wide capacitance application range by using SMIC 0.18μm CMOS technology. The circuit is composed of a capacitive readout circuit, a demodulator, and a low-pass filter. To detect the weak capacitive signal, the capacitor readout circuit of this paper adopts the continuous-time voltage mode charge amplifier structure and combines with the signal modulation technology and the optimization of the MOS transistor size to achieve low noise and high resolution. With the application of the signal modulation technology, the low-frequency capacitance sensor signal is shifted from 2-12 kHz to high-frequency 800 kHz. The signal modulation technology modulates the low-frequency capacitive sensor signal of 2~12 kHz at the high frequency of 800 kHz, and the signal is converted into voltage through the capacitive readout circuit. The simulation results show that the designed analog front-end circuit can convert the accelerometer capacitance signal with the frequency of 2~12 kHz, the dynamic capacitance peak is 0.108 pF, and the static capacitance is 10 pF into the expected voltage signal. In addition, the output noise can be as low as 556 nV/√Hz in the capacitive frequency range of the accelerometer, which meets the requirement of 2.5 aF capacitive resolution. Therefore, the silicon micro-accelerometer analog front-end circuit designed in this paper has the characteristics of a wide capacitor application range, low noise, and high resolution, and can be widely used.

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Suppressed drift and low-noise sensor module with a single-axis gold proof-mass MEMS accelerometer for micro muscle sound measurement

Cited by 11 publications

References 31 publications

Serpentine spring design technique for high sensitivity MEMS capacitive accelerometer fabricated by gold multi-layer metal technology

Serpentine spring design technique for high sensitivity MEMS capacitive accelerometer fabricated by gold multi-layer metal technology

Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers

A Pseudo-Differential Capacitive MEMS Accelerometer Analog Front-End Design

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