1989
DOI: 10.1002/rcm.1290031203
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A deceleration lens system for hybrid mass spectrometers

Abstract: A simple and efficient deceleration system for the coupling of magnetic and electric sector instruments to quadrupole analyzers is described. The transmission efficiency of the system appears to be at least 80% or better as the ions are decelerated from 3 keV to 30 eV (a deceleration factor of 1 : 100). No mass discrimination was observed in the range up to mass 1OOO.The technique of mass spectrometry has, in tQe last few years, grown enormously. Much of this new growth has been in the development of multisect… Show more

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Cited by 6 publications
(3 citation statements)
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“…Deceleration of ions that move with kilovolt energies is not trivial and has been a goal of instrumentalists for many years [8][9][10][11][12][13][14][15][16][17][18][19]. Many studies have been carried out in hybrid configuration instruments (typically BEqQ), where the high energy ions generated from a sector mass spectrometer are decelerated, refocused, and injected into devices like a quadrupole [9,12,13,16], hexapole [11], octapole [15], or drift cell [14]. A few groups have addressed the problem of deceleration for collisions in four-sector instruments, experimentally [10,17,19] or theoretically [18].…”
Section: The New Tandem Mass Spectrometry Interfacementioning
confidence: 99%
“…Deceleration of ions that move with kilovolt energies is not trivial and has been a goal of instrumentalists for many years [8][9][10][11][12][13][14][15][16][17][18][19]. Many studies have been carried out in hybrid configuration instruments (typically BEqQ), where the high energy ions generated from a sector mass spectrometer are decelerated, refocused, and injected into devices like a quadrupole [9,12,13,16], hexapole [11], octapole [15], or drift cell [14]. A few groups have addressed the problem of deceleration for collisions in four-sector instruments, experimentally [10,17,19] or theoretically [18].…”
Section: The New Tandem Mass Spectrometry Interfacementioning
confidence: 99%
“…Ions leaving the Penning ion source are decelerated and focused by a modified deceleration lens system, according to Ref. 6. Mass analysis is done by a quadrupole mass analyzer (QMA 150, ro= 3.45 mm, d = 8 mm, 1 = 200 mm, Balzers) which is floated relative to the formation potential of the ions.…”
Section: Methodsmentioning
confidence: 99%
“…Different methods to decelerate ions down to 10 eV and even lower energies were reported in the literature. [15][16][17] This article describes the construction of a low energy ͑5-500 eV͒, mass selected ͑1-2048 amu͒ ion beam source for the investigation of ion induced surface modifications and for the deposition of very thin films. As this instrument will be operated in an ultrahigh vacuum ͑UHV͒ chamber equipped with low-energy electron diffraction ͑LEED͒, XPS, and XPD to study substrate-film interactions and film growth mechanisms, no attempt was made to reach high ion currents.…”
Section: Introductionmentioning
confidence: 99%