A critical review of spectral and related physical properties of the hollow cathode discharge

Pillow, M E

doi:10.1016/0584-8547(81)80064-x

Cited by 67 publications

(23 citation statements)

References 43 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…We have investigated the dc breakdown and current characteristics of various PP structures and have tested pd and j/p 2 scaling for gaps of a few millimetres down to 20 µm [12,13,33]. Low pressure conventional hollow cathodes (CHCs) have a complicated dependence on various discharge parameters and have been extensively studied [34][35][36]. Analysis by Kolobov and Tsendin [35] concluded that exponential electron multiplication within large sheath regions was responsible for the hollow cathode effect (HCE) whereas a model by Arslanbekov et al [37] indicates pendular electron motion (electrostatic trapping) and linear electron multiplication in the plasma bulk leads to very thin cathode sheaths and HCE.…”

Section: Introductionmentioning

confidence: 99%

Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown

Greenan

Mahony

Mariotti

et al. 2011

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

We present an experimental comparison of parallel plate and hollow cathode microplasma structures, operated at high pressure with narrow anode-cathode gaps. A moveable anode arrangement with ±12 µm spatial resolution was used to vary the electrode separation to cover the pd range between 0.01 and 4 Torr cm for both structures. The hollow cathode discharge was operated with pressure-diameter (pD) product values between 1.8 and 7.2 Torr cm and an aspect ratio of ∼5. Analysis of V -I characteristics shows j/p 2 and j 2 p scaling for low and high current modes, respectively. Electron temperature estimates between 2 and 3 eV were obtained by solving a numerical collisional-radiative model based on transitions from 4p argon levels. The hollow cathode sheath thickness for both ionizing and non-ionizing sheath conditions was determined analytically and the diffusion equation was solved numerically to estimate the plasma density profile for the ionizing sheath case.

show abstract

Section: Introductionmentioning

confidence: 99%

Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown

Greenan

Mahony

Mariotti

et al. 2011

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…The observed behavior may be explained in terms of a radial distribution of the electron number density within the hollow cathode tube. It has been reported in the literatures 15,16 that the electron number density varies with the pressure increase, as shown in Fig. 6.…”

Section: Optimization Of Experimental Parametersmentioning

confidence: 64%

Development of a Laser Ablation-Hollow Cathode Glow Discharge Emission Source and the Application to the Analysis of Steel Samples

2004

View full text Add to dashboard Cite

show abstract

“…Conversely, a very small mean free path would not allow the pendulum motion to occur. [24,[145][146][147][148][149][150][151].…”

Section: The Conventional Hollow Cathode Modelmentioning

confidence: 99%

The use of hollow cathodes in deposition processes: A critical review

2015

View full text Add to dashboard Cite

A critical review of spectral and related physical properties of the hollow cathode discharge

Cited by 67 publications

References 43 publications

Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown

Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown

Development of a Laser Ablation-Hollow Cathode Glow Discharge Emission Source and the Application to the Analysis of Steel Samples

The use of hollow cathodes in deposition processes: A critical review

Contact Info

Product

Resources

About