2010 IEEE Radio Frequency Integrated Circuits Symposium 2010
DOI: 10.1109/rfic.2010.5477348
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A cost-competitive high performance Junction-FET (JFET) in CMOS process for RF & analog applications

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Cited by 9 publications
(7 citation statements)
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“…The implanted n-channel JFET is a RF feature in IBM's analog and mixed signal technology offering at 180nm node [3]. A cross section is shown in Fig.…”
Section: Ron Optimizationmentioning
confidence: 99%
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“…The implanted n-channel JFET is a RF feature in IBM's analog and mixed signal technology offering at 180nm node [3]. A cross section is shown in Fig.…”
Section: Ron Optimizationmentioning
confidence: 99%
“…The associated resistance, R series , is determined by the doping in both vertical region from surface to bottom of STI, and the lateral region underneath STI. Since R on scales linearly with the channel length [3], a linear regression is well suited to extract R series from the y-axis intercept. Applying this method to the existing JFET design, the result shows R series accounts for 75% of total R on .…”
Section: Ron Optimizationmentioning
confidence: 99%
See 1 more Smart Citation
“…Often for more aggressive CMOS nodes, only a few implants are available to define JFETs. Additionally, shallow-trench isolation (STI) is used for these JFETs to achieve high breakdown voltages [12]. However, this can compromise flicker noise performance because of charge traps at these STI interfaces.…”
Section: Introductionmentioning
confidence: 99%
“…And it is even more cost-effective to do the integration in standard, commercial technologies without any extra process addition or modification. There have been several attempts to implement JFET's in CMOS and bipolar-CMOS-DMOS (BCD) technologies [1][2][3][4][5][6]. However, these developments required extra implantation steps and/or SOI wafers, and the processes thus developed were all proprietary.…”
Section: Introductionmentioning
confidence: 99%