2018
DOI: 10.1016/j.matpr.2017.10.176
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A comprehensive study of mechanical and chemo-mechanical polishing of CVD diamond

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Cited by 12 publications
(11 citation statements)
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“…Scientific investigation of the processes underlying diamond polishing has been performed for a long time. Up to now, diverse polishing techniques based on different physical and chemical principles have been introduced, e.g., (i) mechanical polishing with diamond powder [6], (ii) chemical-mechanical polishing [7][8][9], (iii) laser smoothing [10], (iv) plasma etching [11][12][13], (v) molten eutectic [14], (vi) ion beam smoothing [15][16], (vii) high rate ultrasonic polishing with slurry [5] and even (viii) multi-step processing [17]. However, most processes are either time-consuming or complicated, and some are incapable of achieving the ultra-smooth surface required.…”
Section: Introductionmentioning
confidence: 99%
“…Scientific investigation of the processes underlying diamond polishing has been performed for a long time. Up to now, diverse polishing techniques based on different physical and chemical principles have been introduced, e.g., (i) mechanical polishing with diamond powder [6], (ii) chemical-mechanical polishing [7][8][9], (iii) laser smoothing [10], (iv) plasma etching [11][12][13], (v) molten eutectic [14], (vi) ion beam smoothing [15][16], (vii) high rate ultrasonic polishing with slurry [5] and even (viii) multi-step processing [17]. However, most processes are either time-consuming or complicated, and some are incapable of achieving the ultra-smooth surface required.…”
Section: Introductionmentioning
confidence: 99%
“…Due to the high hardness of the coating, the existing methods of grinding and finishing [1][2][3][4] did not provide the required surface roughness, which should be Ra 0.04 and at which the graphite particle and all other coating particles with poor adhesion are removed. Therefore, they are replaced by other methods, the most promising of which is the method of thermochemical treatment [5][6][7][8].…”
Section: Methodsmentioning
confidence: 99%
“…However, much later on when the modern-day science started to develop, scientist found that the indentation hardness values in GPa [53] is the highest for diamond materials. Figure 5 compares the GPa hardness of different engineering materials.…”
Section: Mechanical Engineeringmentioning
confidence: 99%