“…Scientific investigation of the processes underlying diamond polishing has been performed for a long time. Up to now, diverse polishing techniques based on different physical and chemical principles have been introduced, e.g., (i) mechanical polishing with diamond powder [6], (ii) chemical-mechanical polishing [7][8][9], (iii) laser smoothing [10], (iv) plasma etching [11][12][13], (v) molten eutectic [14], (vi) ion beam smoothing [15][16], (vii) high rate ultrasonic polishing with slurry [5] and even (viii) multi-step processing [17]. However, most processes are either time-consuming or complicated, and some are incapable of achieving the ultra-smooth surface required.…”