“…Nonetheless, nonaqueous potentiometric titration has rarely been applied to resist polymers so far, except for a few preliminary reports. 9,10 In this study, nonaqueous potentiometric titration was demonstrated for t-butyl methacrylate-methacrylic acid copolymers (Poly-(BuMA1-xMAAx), x; copolymerization ratio), which are typical polymers and are also used as a model of resist polymers. The copolymerization ratio dependence of the acid dissociation of Poly(BuMA1-xMAAx) is discussed in detail.…”