A comparison of on‐line digital recording with conventional photographic recording for scanning electron microscopy

Abstract

The scanning electron microscope (SEM) has previously utilized a video monitor plus camera as the image recording system. However, this conventional method is inefficient in relation to information present in the original electric signal. Therefore, we propose, for general use, an on-line recording system consisting of an A-D converter, image memory, and computer. In addition, we found that the effect of vibration in the SEM image could be reduced by application of the digital recording system. In the present study, interpolation and signal averaging programs were utilized for confirming the performance level of the on-line recording system. These programs were found to be very effective for SEM.

A simple method for the acquisition of high‐quality digital images from analog scanning electron microscopes

“…When combined with digital image processing, the digitally recorded SEM images provide some additional options. Algorithms for enhancement of edges and local contrast as well as suppression of noise ( Oho et al ., 1984 , 1986, 1987, 1990) allow important image structures to be emphasized ( Fig. 3).…”

“…This is probably due to a less defined focus of the electron beam in the tube used for conventional photography, in particular when deflected to the periphery ( Reimer, 1985). In addition, sharpness and resolution of camera lenses typically decrease to the periphery, and the SEM image recorded on the film is disturbed by the film‐grain noise ( Oho et al ., 1986 ). The maximum size of prints with acceptable sharpness was 13 × 18 cm in conventional images, but could be increased to 50 × 60 cm in digital images.…”

A method using an on‐line digital computer for the improvement of resolution of backscattered electron images

“…Figure l(a) was originally represented by 512 x 512 pixels. The details of the digital expansion technique, employing modified bi-linear interpolation, have been described by Oho et al (1986b). An SE image of the same region (recording time of 80 s) is shown in Fig.…”