A Comparative Study of Microwave and Radiofrequency Plasma Polymerization of Benzene

Duvol, M.; Théorět, A.

doi:10.1149/1.2134265

Cited by 22 publications

(7 citation statements)

References 19 publications

(43 reference statements)

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“…Three works report on species identification in a pure benzene discharge [22][23][24]. Biphenyl (m/z = 154) reported by Weisbeck can likely correspond to our species C 12 H 10 (154), by far the dominant species in its mass region [22].…”

Section: Benzene Plasmamentioning

confidence: 77%

“…Identification of species in benzene discharges was scarcely investigated. Four works reported species from a fundamental or polymerization point of view [22][23][24][25]. Mixing it with noble gases, other studies focused on its decomposition in atmosphere for environmental protection [26,27], or on soot formation in combustion flames [28,29].…”

Section: Introductionmentioning

confidence: 99%

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Plasma polymerization chemistry of unsaturated hydrocarbons: neutral species identification by mass spectrometry

Gillon

Houssiau

2014

Plasma Sources Sci. Technol.

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Radio frequency discharges ignited in low-pressure and pure hydrocarbon gases were investigated by mass spectrometry. The plasma process was applied to four unsaturated monomers: styrene C 8 H 8 , benzene C 6 H 6 , ethylene C 2 H 4 and acetylene C 2 H 2 . The remote mass spectrometer location restricted species identification to neutral closed-shell molecules in their respective plasmas. Among the peaks in the mass spectra, those directly due to neutrals produced in the plasma were determined following a successful two-step methodology. Firstly, the use of low electron impact energy limited the fragmentation and strongly simplified the cracking patterns. Secondly, attribution of peaks directly due to neutrals was confirmed or ruled out by systematically measuring their appearance potential. In the case of styrene, not less than 48 new molecules were detected.The discussion of the observed stable by-products in each discharge suggested several radicals responsible for their production. Comparing the set of species among the four plasmas showed that the repeated addition of intermediates with one or two carbon atoms and with low H content dominated the chemistry. Under our conditions of intermediate to high W/FM (power over mass flow ratio), the gas-phase plasma polymerization then preferentially occurred through significant fragmentation and recombination. Finally, the measured appearance potentials during plasma provided estimation for the threshold ionization energy of several highly unsaturated hydrocarbons, useful for modeling.

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Section: Benzene Plasmamentioning

confidence: 77%

Section: Introductionmentioning

confidence: 99%

Plasma polymerization chemistry of unsaturated hydrocarbons: neutral species identification by mass spectrometry

Gillon

Houssiau

2014

Plasma Sources Sci. Technol.

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“…A microwave (MW)-powered system is one of such systems, and it is characterized by tubular quartz or Pyrex reactors and by a resonant cavity coupled with a power supply typically in the resonant cavity. The polymers generally collect outside the glow region [26]. The differences between the MW discharge and the RF discharge have been discussed [27].…”

Section: Electrodeless Microwave or High-frequency Reactorsmentioning

confidence: 99%

Plasma Polymerized Films for Sensor Devices

Hiratsuka

Karube

2000

Electroanalysis

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Miniaturization with semiconductor microfabrication or micromachining techniques is one of the main concerns in sensor technologies. For the combination of sensor and microelectronics technology, polymers should be fabricated in a mass‐producible and miniaturization‐conscious manner as an interface. The polymers fabricated in conventional manners could have potential problems, e.g., obtaining thin (<1 µm) and homogeneous films. Plasma‐polymerized films, which are made in a glow discharge or plasma in a vapor phase, offer a new alternative. This review describes the several characteristics, properties, and applications of plasma‐polymerized films in both chemical and biological fields.

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“…Yasuda and Wang proposed to use the composite parameter of WIFM, where W is RF power, F is monomer flowrate and M is molecular weight of the monomer [20]. Furthermore, influences of pressure ( P ) and applied RF power (W) are interrelated, and it is convenient and practical to consider the power/ pressure ratio (WIP) as a parameter of the energy given to the plasma [21]. Generally speaking, the greater the values of WIFM and WIP, the more energetic the particles in the plasma.…”

Section: Characterization Of Plasma-polymerized Devsmentioning

confidence: 99%

Ionically conductive thin polymer films prepared by plasma polymerization, part 9: Vapor‐phase preparation of solid polymer electrolytes composed of plasma polymer and lithium trifluoromethanesulfonate

Ogumi

Uchimoto

Endo

et al. 1993

Polymers for Advanced Techs

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Solid polymer electrolytes composed of plasma-polymerized dimethyl-2-1(2-ethoxy-ethoxy)ethoxy1vinylsilaneand thermal vapor-deposited lithium trifluoromethanesulfonate have been prepared, and characterized using electron spectroscopy for chemical analysis (ESCA), Fourier transformlinfrared spectroscopy (FTIR), scanning electron microscopy (SEM) and electrochemical techniques. The obtained solid polymer electrolyte films of about 1 ,urn thickness were uniform and pinhole-free. Room temperature conductivity of 8 X S/cm has been observed. This value depends on the substrate temperature during the plasma polymerization, and the variation of the ionic conductivity with temperature can be described by using a Williams-Landel-Ferry equation.

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A Comparative Study of Microwave and Radiofrequency Plasma Polymerization of Benzene

Abstract: not Available.

Cited by 22 publications

References 19 publications

Plasma polymerization chemistry of unsaturated hydrocarbons: neutral species identification by mass spectrometry

Plasma polymerization chemistry of unsaturated hydrocarbons: neutral species identification by mass spectrometry

Plasma Polymerized Films for Sensor Devices

Ionically conductive thin polymer films prepared by plasma polymerization, part 9: Vapor‐phase preparation of solid polymer electrolytes composed of plasma polymer and lithium trifluoromethanesulfonate

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