A comparative study of methods for thin-film and surface analysis

Werner, H. W.; Garten, R. P. H.

doi:10.1088/0034-4885/47/3/001

Cited by 106 publications

(24 citation statements)

References 705 publications

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“…It has been suggested that combining these with matrix correction factors leads to an accuracy of -15%. 31 The results of this study indicate that the variability in surface roughness alone can lead to an error approaching 20%. Therefore, unless great care is taken in controlling the effects of surface roughness, through the preparation and analysis of the elemental standards used for determining the sensitivity factors and the analysed sample(s), the attainable accuracy is poor.…”

Section: Discussionmentioning

confidence: 76%

Crystal orientation effects on the surface morphology produced by ion bombardment of a pure element: Implications for quantitative surface analysis

Dawson

Petrone

1991

Surface & Interface Analysis

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The effect of crystal orientation and surface morphology on the detected Auger current was investigated using a polycrystalline Mo sample. The sample was initially polished to a uniform and featureless surface morphology. Two large grains were used in the study, with their crystal orientation determined as -(loo) for the low-index grain and -(l, 4, 11) for the high-index grain. Ion bombardment conditions used were typical for surface analysis, i.e. 2 keV Ar+ at glancing incidence. The initial Auger current measured from the cleaned as-polished surface was found to be essentially constant across both crystals. However, under continued ion bombardment, as the fluence was increased to -5 x 10'' ions cm-', gross differences of up to 18% were observed in the detected Auger current from the two crystal surfaces. This gross difference is attributed to the extent of surface roughness that evolved, which is in turn mainly dependent on the crystal orientation. It was found that, relative to the polished surface, the high-index grain developed considerable texture of macroscopic dimensions consisting mainly of 'hills and valleys' with a 'furrowed' fine structure in the direction of the ion beam, yielding a net decrease in the detected Auger current. The low-index grain became smoother, yielding a net increase in the detected Auger current. This latter effect was much larger than the decrease resulting from the increased roughening of the high-index grain. The implications for quantitative surface analysis are discussed.

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Section: Discussionmentioning

confidence: 76%

Crystal orientation effects on the surface morphology produced by ion bombardment of a pure element: Implications for quantitative surface analysis

Dawson

Petrone

1991

Surface & Interface Analysis

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“…The characterization of surface segregation must therefore be not only surface sensitive, but composition to a depth of the order of a few atomic layers becomes essential. At present, these characterization requirements are met to a large extent by analysis techniques based on electron and ion spectroscopies [17][18]. These are Auger electron spectroscopy (AES) [19], angle-resolved X-ray photoelectron spectroscopy or angle-resolved ESCA i.e.…”

Section: Characterizing Surface Segregationmentioning

confidence: 99%

Surface Segregation in Multicomponent Clusters

Dowben

Palina

et al. 2005

MRS Proc.

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Nanostructured materials are not immune from surface segregation, as can be shown for solid samples made from nanosized BaFe 12-2x Co x Ti x O 19 barium ferrite particles and a variety of free clusters. Both theory and experiment provide ample demonstration that very limited dimensions of very small clusters does not necessarily impart stability against surface and grain boundary segregation. In fact, with the larger surface to volume ratio in small clusters and lower average atomic coordination, we anticipate that compositional instabilities in small clusters will readily occur.

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“…3,4 A double focusing type analyzer reduced the secondary beam energy spread. A Faraday cup and electron multiplier detectors were used with ion currents of 10 -8 to 10 -14 A.…”

Section: Secondary Ion Mass Spectrometrymentioning

confidence: 99%

Use of combined NAA and SIMS analyses for impurity level isotope detection

Miley

Narne

Woo

2005

J Radioanal Nucl Chem

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Neutron activation analysis (NAA) offers advantages for detecting impurity levels of select isotopes that have suitable neutron cross sections. Secondary ion mass spectrometry (SIMS) on the other hand detects most isotopes, but suffers various molecular interferences and covers only a small beam size volume per run. These two methods are combined here to study a large number of isotopes in titanium thin films in an electrolytic cell experiment. Nine isotopes are covered by NAA and over 50 with SIMS. An overlap in the data sets allows a normalization of SIMS data to the more accurate NAA measurements.

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A comparative study of methods for thin-film and surface analysis

Cited by 106 publications

References 705 publications

Crystal orientation effects on the surface morphology produced by ion bombardment of a pure element: Implications for quantitative surface analysis

Crystal orientation effects on the surface morphology produced by ion bombardment of a pure element: Implications for quantitative surface analysis

Surface Segregation in Multicomponent Clusters

Use of combined NAA and SIMS analyses for impurity level isotope detection

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