2019
DOI: 10.1016/j.microrel.2019.03.007
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A comparative study of lifetime reliability of planar MOSFET and FinFET due to BTI for the 16 nm CMOS technology node based on reaction-diffusion model

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Cited by 15 publications
(6 citation statements)
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“…High voltage operations of transistors introduce many reliability issues such as Time-Dependent Dielectric Breakdown (TDDB), Bias Temperature Instability (BTI), and Hot-Carrier Injection (HCI). These are the dominant causes of aging in scaled technology nodes (45nm and below) [61]. In older nodes, Electromigration (EM) also plays a key role [23, 25-30, 69, 79].…”
Section: Transistor Aging In Neuromorphic Hardwarementioning
confidence: 99%
“…High voltage operations of transistors introduce many reliability issues such as Time-Dependent Dielectric Breakdown (TDDB), Bias Temperature Instability (BTI), and Hot-Carrier Injection (HCI). These are the dominant causes of aging in scaled technology nodes (45nm and below) [61]. In older nodes, Electromigration (EM) also plays a key role [23, 25-30, 69, 79].…”
Section: Transistor Aging In Neuromorphic Hardwarementioning
confidence: 99%
“…In [ 10 ], the author reveals that the NBTI recovery mechanism is more important in a 20 nm MOSFET than in a 14 nm FinFET, which may explain why the overall degradation due to NBTI is greater in the FinFET [ 9 ]. A simulation based on the diffusion–reaction model of a 16 nm MOSFET and FinFET is performed in [ 11 ] and indicates that the propagation delay degradation is higher in MOSFET. In [ 9 ], the author shows that the HCI is lower in the FinFET than in the MOSFET for low drain voltages, and this trend reverses for high drain voltages.…”
Section: Introductionmentioning
confidence: 99%
“…At the 5-nm technology node, comparisons have been made of transistor performance between FinFET and gate-all-around (GAA) technologies with actual gate lengths of 16 nm [ 5 ]. In regard to 16-nm CMOS technology, comparative studies of lifetime reliability between planar MOSFETs with a gate length of 30 nm and FinFETs with a gate length of 20 nm have been undertaken [ 6 ].…”
Section: Introductionmentioning
confidence: 99%
“…However, FinFETs are susceptible to self-heating and are more expensive than traditional planar transistors. Comparative studies investigating the effects of bias temperature instability on lifetime reliability indicate trade-offs between planar MOSFETs and FinFETs in advanced nodes such as 16 nm [ 6 ]. Therefore, planar bulk MOSFET technology using mature and conventional processing technologies can be an alternative manufacturing option compared to the FDSOI and FinFET approaches beyond 28 nm, if unwanted SCEs can be suppressed [ 27 ].…”
Section: Introductionmentioning
confidence: 99%
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