A compact efficient deep ultraviolet laser at 266 nm

Abstract

We present a highly efficient and cost-effective watt-level deep-ultraviolet laser operating at 266 nm. Type-I phase-matching LBO crystals and type-I phase-matching BBO crystals were used for frequency doubling and fourth-harmonic generation, respectively. The highest 1.82 W average power of the 266 nm laser was obtained from nonlinear frequency conversion at a repetition rate of 30 kHz and a pump power of 18.8 W. The conversion efficiency from the diode to the deep-ultraviolet laser scales up to 10.7%. This is, to our knowledge, the highest efficiency ever reported generated from a laser diode single-end-pumped acousto-optic Q-switched system.

Improved beam profile of a 266 nm deep ultraviolet laser employing a multi-mirror-reflected cavity

“…In 2012, Sirotkin [11] reported a similar ultraviolet-infrared radiation (UV-IR) passively Q-switched laser, although the Improved beam profile of a 266 nm deep ultraviolet laser employing a multi-mirror-reflected cavity structure was practical for a medical laser system, the beam profile was not mentioned and the output power was only 32.5 mW. High efficiency was presented by Zhai et al [12] in 2013 with the output 532 nm HR and a 266 nm HT plant mirror replaced with a same coated concave mirror to enhance the efficiency. The green to DUV optics efficiency was as high as 43.6%, but there was a serious divergence of the output beam because the output mirror was concave.…”

Laser-induced behavior of BK7 mirror in a compound resonator on watt level DUV laser

“…In our pervious papers, a quasi-enhanced cavity with a BBO crystal was investigated on an end-pump laser diode module to generate watt level AO Q-switched 266-nm DUV radiation (Zhuang et al 2010(Zhuang et al , 2011Zhai et al 2013). The side-pump laser diode (LD) module was rarely applied to directly achieve DUV power.…”