Improved beam profile of a 266 nm deep ultraviolet laser employing a multi-mirror-reflected cavity

Abstract

A 266 nm deep ultraviolet (DUV) laser with a good Gaussian profile is reported employing a multi-mirror-reflected cavity. A type-I LiB3O5 (LBO) crystal is used to double the fundamental-light (1064 nm) wavelength generated by an actively Q-switched Nd:YVO4 laser with an intra-cavity configuration. A fourth harmonic generation (FHG) wavelength is obtained by a type-I β-BaB2O4 (BBO) crystal. The output power as high as 440 mW at 266 nm is generated under an incident power of 2.26 W at 532 nm, corresponding to the conversion efficiency of 532 nm–266 nm up to 19.5% with a repetition rate of 15 kHz and the pulse duration of 266 nm is 10.7 ns.