A CMOS Test Chip With Simple Post-Processing Steps for Dry Characterization of ISFET Arrays

Wrege, Rodrigo; Peter, Celso; Wesling, Bruno N.; Rambo, Carlos R.; Schneider, M.C.; Galup-Montoro, Carlos

doi:10.1109/jsen.2020.3035627

Cited by 5 publications

(5 citation statements)

References 25 publications

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“…Among the different forms of biochemical sensors, the combination of biological elements and an FET is the most intriguing. In 1970, an FET without a gate metallization was designated as an ion-sensitive FET (ISFET) for detecting ion concentrations [ 94 , 95 ]. This modified FET was classified as an oxide semiconductor field-effect transistor (OSFET).…”

Section: Various Types Of Electrochemical Biosensors For Live-cell De...mentioning

confidence: 99%

Recent Advances in Electrochemical Biosensors for Monitoring Animal Cell Function and Viability

Koo

Kim

et al. 2022

Biosensors

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Redox reactions in live cells are generated by involving various redox biomolecules for maintaining cell viability and functions. These qualities have been exploited in the development of clinical monitoring, diagnostic approaches, and numerous types of biosensors. Particularly, electrochemical biosensor-based live-cell detection technologies, such as electric cell–substrate impedance (ECIS), field-effect transistors (FETs), and potentiometric-based biosensors, are used for the electrochemical-based sensing of extracellular changes, genetic alterations, and redox reactions. In addition to the electrochemical biosensors for live-cell detection, cancer and stem cells may be immobilized on an electrode surface and evaluated electrochemically. Various nanomaterials and cell-friendly ligands are used to enhance the sensitivity of electrochemical biosensors. Here, we discuss recent advances in the use of electrochemical sensors for determining cell viability and function, which are essential for the practical application of these sensors as tools for pharmaceutical analysis and toxicity testing. We believe that this review will motivate researchers to enhance their efforts devoted to accelerating the development of electrochemical biosensors for future applications in the pharmaceutical industry and stem cell therapeutics.

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Section: Various Types Of Electrochemical Biosensors For Live-cell De...mentioning

confidence: 99%

Recent Advances in Electrochemical Biosensors for Monitoring Animal Cell Function and Viability

Koo

Kim

et al. 2022

Biosensors

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“…In previous studies, many researchers have attempted to improve the performance of ISFET devices and compensate for non-ideal effects. Wrege’s research team developed the ISFET chip [ 11 ] that was manufactured using a standard 180 nm complementary metal-oxide semiconductor (CMOS) technology. By using the dry test, which is not disturbed by chemical contributions, charges can also be captured in the passivation layer.…”

Section: Introductionmentioning

confidence: 99%

“…RuO 2 is used as a passivation layer for the sensing window on the top metal. In recent years, there have been many studies on the application of pH sensors in ISFETs [ 11 , 21 , 22 , 23 ]. However, the combination of enzymes, analytes, and catalysts with microfluidics is rarely discussed.…”

Section: Introductionmentioning

confidence: 99%

The Characteristics Analysis of a Microfluid-Based EGFET Biosensor with On-Chip Sensing Film for Lactic Acid Detection

Kuo

Chang

Lai

et al. 2022

Sensors

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In this research, a microfluid-based extended gate field-effect transistor (EGFET) biosensor with an on-chip sensing window (OCSW) was fabricated. The detection window was composed of six metal layers, and a ruthenium dioxide (RuO2) film was spattered on the surface and functionalized with lactase to detect lactic acid (LA). To detect LA in a more diversified way, a microfluidic system was integrated with the biosensor. Moreover, a special package was used to seal the sensing window and microfluidic tube and insulate it from other parts to prevent water molecule invasion and chip damage. The sensitivity analysis of the EGFET biosensor was studied by a semiconductor parameter analyzer (SPA). The static and dynamic measurements of the EGFET with sensing windows on a chip were analyzed. The sensing characteristics of the EGFET biosensor were verified by the experimental results. The proposed biosensor is suitable for wearable applications due to the advantages of its low weight, low voltage, and simple manufacturing process.

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“…By incorporating the ammonium hydroxide treatment, the properties of ISFET further were improved. Meanwhile, Wrege's study team proposed an array ISFET chip [12], which was fabricated through a 180 nm high voltage CMOS process.…”

mentioning

confidence: 99%

“…For this study, the RuO2 was used as the passivation layer on the top metal of the sensing window. Although plenty of research studies on ISFET for pH sensing have been conducted recently [10][11][12][13][14], very few explored analytes, enzymes, and catalysts together. In the present study, we fabricated an EGFET device for uric acid (UA) detection.…”

mentioning

confidence: 99%

Analysis of CMOS Extended-Gate Field-Effect Transistor With On-Chip Window Based on Uricase/RuO₂ Sensing Film

Kuo¹,

Chen

Lai

et al. 2021

IEEE J. Electron Devices Soc.

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A CMOS Test Chip With Simple Post-Processing Steps for Dry Characterization of ISFET Arrays

Cited by 5 publications

References 25 publications

Recent Advances in Electrochemical Biosensors for Monitoring Animal Cell Function and Viability

Recent Advances in Electrochemical Biosensors for Monitoring Animal Cell Function and Viability

The Characteristics Analysis of a Microfluid-Based EGFET Biosensor with On-Chip Sensing Film for Lactic Acid Detection

Analysis of CMOS Extended-Gate Field-Effect Transistor With On-Chip Window Based on Uricase/RuO₂ Sensing Film

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A CMOS Test Chip With Simple Post-Processing Steps for Dry Characterization of ISFET Arrays

Cited by 5 publications

References 25 publications

Recent Advances in Electrochemical Biosensors for Monitoring Animal Cell Function and Viability

Recent Advances in Electrochemical Biosensors for Monitoring Animal Cell Function and Viability

The Characteristics Analysis of a Microfluid-Based EGFET Biosensor with On-Chip Sensing Film for Lactic Acid Detection

Analysis of CMOS Extended-Gate Field-Effect Transistor With On-Chip Window Based on Uricase/RuO2 Sensing Film

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Product

Resources

About

Analysis of CMOS Extended-Gate Field-Effect Transistor With On-Chip Window Based on Uricase/RuO₂ Sensing Film