A CMOS humidity sensor with on-chip calibration

Qiu, Yanyan; Azeredo-Leme, C.; Alcacer, Luis; Franca, J.E.

doi:10.1016/s0924-4247(01)00543-x

Cited by 67 publications

(19 citation statements)

References 11 publications

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“…There have been lots of researches on various types of humidity sensors [13]- [15]. However, it is challengeable to utilize these sensors to monitor humidity in sealed environments, such as food packages and constructions, where a physical connection between the sensor and the reader is often difficult, or in some cases even impossible.…”

Section: Introductionmentioning

confidence: 99%

An <italic>LC</italic>-Type Passive Wireless Humidity Sensor System With Portable Telemetry Unit

Zhang

Wang

Huang

et al. 2015

J. Microelectromech. Syst.

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This paper presents a high-sensitivity passive wireless humidity sensor system with a portable telemetry unit for applications in sealed environments. A complementary metal oxide semiconductor (CMOS) interdigital capacitive humidity sensor die was attached to an organic substrate (FR-4) on which a fixed planar spiral copper inductor was fabricated. The variable capacitor and the fixed inductor were wire bonded to form an inductor-capacitor (LC) tank circuit. The resonant frequency of the sensor tank is dependent on the sensor capacitance, which changes in response to the humidity. The sensitivity of the capacitive sensor was improved significantly using graphene oxide as a sensing material. The package-level integration was achieved by employing the embedded inductor on an organic packaging substrate. The LC-type sensor is interrogated wirelessly using our homemade portable telemetry unit, which is based on a standing wave ratio bridge to measure the real part of the readout coil impedance. Measurements show a sensitivity of −18.75 kHz/%RH over a range of 15%-95% RH. The implemented telemetry unit addresses the need for a low-cost, portable, and universal reader of the LC-type passive wireless sensors.[ 2013-0188]Index Terms-Humidity sensor, LC resonant sensor, passive sensor, wireless sensor, telemetry.

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Section: Introductionmentioning

confidence: 99%

An <italic>LC</italic>-Type Passive Wireless Humidity Sensor System With Portable Telemetry Unit

Zhang

Wang

Huang

et al. 2015

J. Microelectromech. Syst.

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“…In addition, the dynamic characteristics of the system with pure lag or nonminimum phase are not affected by the direct application of the algorithm [17][18][19][20][21]. For resolving issues related to rain (cloud) drops soaked, freezing and other conditions that causing the humidity sensor to detect inaccurate moisture signals, a dual heating radiosonde humidity sensor was proposed in this paper based on the traditional heating control method, which effectively reduces the impact of humidity measurement accompanied with external environment [22][23][24][25][26][27][28][29].…”

Section: Introductionmentioning

confidence: 99%

Heating Control of Heated Twin Radiosonde Humidity Sensor Based on DMC

Sun

Zhang

et al. 2016

Polish Maritime Research

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“…Thus, a low cost and integrated CNTs sensor and interface circuit could enable the establishment of the chemical sensor system and also pave way for various CNTs integration application in VLSI, such as interconnections in multilayers ， field emitting flat panel display and conductive channel in MOSFETs [2]. However, international reports of CNTs sensor integration mainly adopt MEMS technique combining IC circuits, which are still expensive and hardly compatible for national MEMS fabrication status [3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Design of single chip integration of MWNTs/SiO<inf>2</inf> humidity sensor and its interface ASIC

Liu

Yin

et al. 2012

2012 International Conference on Optoelectronics and Microelectronics

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A design on single chip integration of MWNTs/SiO 2 thin film humidity sensor and interface circuit based on standard IC process is presented. Humidity sensing unit on chip surface is achieved following 0.5um CMOS layout design rules, which ensures compatibility and reliability of the whole system. Interface circuit with phase sensitive demodulation can detect nF level capacitance and derive a proportional direct output voltage. AC signal frequency on testing system can influence interface performance and measurable peak capacitance will descend from 40 nF to less than 25 nF as frequency ascend from 5kHz to 50kHz. Hspice simulation proves ASIC interface has good linearity and low offset, and can work normally for practical MWNTs humidity sensor detection.

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A CMOS humidity sensor with on-chip calibration

Cited by 67 publications

References 11 publications

An <italic>LC</italic>-Type Passive Wireless Humidity Sensor System With Portable Telemetry Unit

An <italic>LC</italic>-Type Passive Wireless Humidity Sensor System With Portable Telemetry Unit

Heating Control of Heated Twin Radiosonde Humidity Sensor Based on DMC

Design of single chip integration of MWNTs/SiO<inf>2</inf> humidity sensor and its interface ASIC

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