2015
DOI: 10.1109/jmems.2014.2333747
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An <italic>LC</italic>-Type Passive Wireless Humidity Sensor System With Portable Telemetry Unit

Abstract: This paper presents a high-sensitivity passive wireless humidity sensor system with a portable telemetry unit for applications in sealed environments. A complementary metal oxide semiconductor (CMOS) interdigital capacitive humidity sensor die was attached to an organic substrate (FR-4) on which a fixed planar spiral copper inductor was fabricated. The variable capacitor and the fixed inductor were wire bonded to form an inductor-capacitor (LC) tank circuit. The resonant frequency of the sensor tank is depende… Show more

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Cited by 58 publications
(34 citation statements)
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“…The readout circuits to capacitive RH sensors can be classified as capacitance-to-voltage (C2V) [14], capacitanceto-frequency (C2F) [15] and capacitance-to-time (C2T) transducers [16], all of which are based on charging and discharging CRH. To reject the large common-mode signal (see Fig.…”
Section: B Existing Readout Circuits To Capacitive Sensorsmentioning
confidence: 99%
“…The readout circuits to capacitive RH sensors can be classified as capacitance-to-voltage (C2V) [14], capacitanceto-frequency (C2F) [15] and capacitance-to-time (C2T) transducers [16], all of which are based on charging and discharging CRH. To reject the large common-mode signal (see Fig.…”
Section: B Existing Readout Circuits To Capacitive Sensorsmentioning
confidence: 99%
“…This solution exploits the magnetic coupling between a primary and a secondary coil to read passive sensors. The primary coil, along with the reading circuitry, forms the readout unit, which reads the sensor unit composed of the sensor element connected to the secondary coil [ 14 , 15 , 16 , 17 ]. This approach offers the promising advantage of reducing the cost of the passive sensor unit, allowing the production of disposable sensors, such as labels, with a passive sensor connected to the embedded coil [ 18 , 19 ].…”
Section: Introductionmentioning
confidence: 99%
“…Besides sensing applications for pressure, position, proximity, liquid level measurement and material analysis, capacitive techniques are promising for contactless operation. Passive wireless humidity sensors [1] and non-contact passive electromagnetic interfaces especially dedicated to capacitive sensors [2][3][4] have been demonstrated, but these adopted measurement techniques generally suffer from a dependency on the interrogation distance, which makes them difficult to apply in real operating conditions. Differently, this paper presents a contactless interrogation system for capacitive sensors that exploits a specific time-gated technique firstly developed for piezoelectric resonant sensors [5,6].…”
Section: Introductionmentioning
confidence: 99%