A capacitively-loaded MEMS Slot element for wireless temperature sensing of up to 300&amp;#x00B0;C

Scott, Sean; Peroulis, Dimitrios

doi:10.1109/mwsym.2009.5165908

Cited by 20 publications

(10 citation statements)

References 6 publications

(5 reference statements)

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“…The Haiying Huang research team reported the microstrip patch antenna temperature sensor, based on Rogers materials, reaching a maximum temperature of 280 °C, beyond which the high-temperature application capacity is still needed [ 29 , 30 , 31 ]. The Ahsan Choudhuri research team presented a concept and model of a passive wireless temperature sensor based on metamaterial for harsh-environment applications, but no measurement experiments [ 32 ].The measuring range of a temperature sensor developed at Purdue University, which is based on microelectromechanical systems technology, reached only 300 °C [ 33 ]. Slotted wireless passive temperature sensors were fabricated by Wu et al [ 34 ] and Cheng et al [ 35 ], but they are not reliable and durable because the metal coating on side walls are difficult to process and easily fall off.…”

Section: Introductionmentioning

confidence: 99%

AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor

et al. 2017

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An aluminum nitride (AlN) based patch antenna-type high-temperature wireless passive sensor is reported to operate as both a sensor and an antenna, which integrates in situ measurement/sensing with remote wireless communication at the same time. The sensor is small, easy to manufacture, highly sensitive and has a high operating temperature; it can be used in high-temperature, chemically corrosive and other harsh environments. The sensing mechanism of the sensor, the dielectric constant of the AlN ceramic substrate, increases with rising temperature, which reduces the resonant frequency of the sensor. Thus, the temperature can be measured by detecting changes in the sensor’s resonant frequency. High-Frequency Simulation Structure (HFSS) software is used to determine the structure and size of the sensor, which is then fabricated using thick-film technology. The substrate of the sensor is AlN ceramic due to its outstanding thermal resistance at high temperature; and its conductors (the radiation patch and the ground under the substrate) are silver-palladium alloy sintered form silver–palladium paste. A vector network analyzer reveals that the sensor’s operating range extends to 700 °C. Furthermore, its resonant frequency decreases from 2.20 GHz to 2.13 GHz with increasing temperature from room temperature (25 °C) to 700 °C, with an absolute sensitivity of 104.77 KHz/°C. Our work verifies the feasibility of measuring high temperatures using AlN-based patch antenna wireless passive temperature sensors, and provides a new material and temperature sensitive structure for high-temperature measurement in harsh environments.

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Section: Introductionmentioning

confidence: 99%

AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor

et al. 2017

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“…Several approaches were made to develop a passive, wireless temperature sensor for high temperature operations. Scott and Peroulis [8] presented a slot antenna with an embedded temperature sensor which can sense up to 300°C. Yang [9] proposed a silicon carbide wireless sensing system that can operate at 450°C under high centrifugal load.…”

Section: Introductionmentioning

confidence: 99%

Concept and Model of a Metamaterial-Based Passive Wireless Temperature Sensor for Harsh Environment Applications

et al. 2015

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Wireless passive temperature sensors are receiving increasing attention due to the ever-growing need of improving energy efficient and precise monitoring of temperature in high temperature energy conversion systems such as gas turbines and coal-based power plants. Unfortunately, the harsh environment such as high temperature and corrosive atmosphere present in these systems has significantly limited the reliability and increased the costs of current solutions. Therefore, this paper presents the concept and design of a low cost, passive, and wireless temperature sensor that can withstand high temperature and harsh environments. The temperature sensor was designed following the principle of metamaterials by utilizing Closed Ring Resonators (CRR) in a dielectric ceramic matrix. The proposed wireless, passive temperature sensor behaves like an LC circuit, which has a temperature dependent resonance frequency. Full wave electromagnetic solver Ansys Ansoft HFSS was used to validate the model and evaluate the effect of different geometry and combination of Split Ring Resonator (SRR) structures on the sensitivity and electrical sizes of the proposed sensor. The results demonstrate the feasibility of the sensor and provide guidance for future fabrication and testing.

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“…For temperature sensors, two main principles based on the variability of the RF resonance have been studied: modification of electromagnetic coupling by bimorph cantilever [1][2][3] and variation of the substrate permittivity [4][5]. The second principle is especially interesting as its fabrication is very simple (only metal patterning on substrate is required).…”

Section: Introductionmentioning

confidence: 99%

Wireless chipless passive microfluidic temperature sensor

Rifai

Debourg

Bouaziz

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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Autonomous wireless sensors are a key technology for "Ambiant Intelligence". For several years, chiplesselectromagnetics sensors are studied to overcome the limitations of other passive sensors like low interrogation distance.In this paper we present a new concept of passive temperature sensor based on the electromagnetic coupling between an RF capacitor and dielectric liquid moving inside a SU8 micro-channel. The concept is validated using water as dielectric liquid with a full scale variation of S11 versus temperature around 8dB at 29.75GHz

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A capacitively-loaded MEMS Slot element for wireless temperature sensing of up to 300°C

Cited by 20 publications

References 6 publications

AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor

AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor

Concept and Model of a Metamaterial-Based Passive Wireless Temperature Sensor for Harsh Environment Applications

Wireless chipless passive microfluidic temperature sensor

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