A broadband electromagnetic characterization of Ba<inf>0.7</inf>Sr<inf>0.3</inf>TiO<inf>3</inf> thin films on coplanar waveguide up to microwave frequencies

Analyses of Substrate-Dependent Broadband Microwave (1–40 GHz) Dielectric Properties of Pulsed Laser Deposited Ba0.5Sr0.5TiO3 Films

“…Thus, a large dielectric tunability and low dielectric loss tangent were simultaneously achieved in these films. Moreover, various reports on strain-engineered BST thin films have been documented in the literature but no clear distinctions between intrinsic and extrinsic contributions to the measured dielectric properties have been made [43][44][45][46][47][48][49][50][51][52]. The approaches have included fabrication on different substrates [43], different film thicknesses [44], different orientation of crystalline substrates [44][45][46][47], different buffer layers on Si substrates [48,49], and platinized Si substrates [50].…”

“…Moreover, various reports on strain-engineered BST thin films have been documented in the literature but no clear distinctions between intrinsic and extrinsic contributions to the measured dielectric properties have been made [43][44][45][46][47][48][49][50][51][52]. The approaches have included fabrication on different substrates [43], different film thicknesses [44], different orientation of crystalline substrates [44][45][46][47], different buffer layers on Si substrates [48,49], and platinized Si substrates [50]. Campbell et al fabricated a series of nanostructured ferroelectric thin films of BST-0.6 on LAO substrates using a pulsed laser deposition system with real-time, in situ process control [51].…”

“…The dielectric constant increased with increasing compressive misfit strain in very good qualitative agreement with predictions after Ban and Alpay [40] for the ferroelectric cubic (c) phase. In general, ε r of epitaxial BST thin films shows dispersive behavior at microwave frequencies, stabilizing above 30 GHz [46]. Most of the previous studies only analyzed over a limited bandwidth [42][43][44][45][46][47][48][49][50], at a single frequency [47] or multiple discrete frequencies [50].…”

“…In general, ε r of epitaxial BST thin films shows dispersive behavior at microwave frequencies, stabilizing above 30 GHz [46]. Most of the previous studies only analyzed over a limited bandwidth [42][43][44][45][46][47][48][49][50], at a single frequency [47] or multiple discrete frequencies [50]. Hence, successful implementation of BST films as electrically tunable dielectrics in microwave devices requires an understanding of both their processing and frequency-dependent dielectric properties [51,52] but with careful considerations of conflating issues of strain and intrinsic/extrinsic effects [17].…”

Propriétés électromagnétiques matériaux par la mesure des paramètres S sur ligne de transmission

“…Plusieurs méthodes de mesures ont ainsi été développées afin d'extraire les caractéristiques électromagnétiques de matériaux jusqu'au terahertz. On distingue ainsi des techniques résonnantes [1], en espace libre [2], capacitives [3], en lignes de transmission [4] et en spectroscopie terahertz [5]. La méthode présentée dans cette étude utilise une topologie en ligne de transmission coaxiale classique dans le but de réaliser un kit de mesure métrologique étalon pour la caractérisation électromagnétique de matériaux diélectriques et/ou magnétiques jusqu'à 18 GHz.…”