A bistable microrelay based on two-segment multimorph cantilever actuators

Sun, Xi-Qing; Farmer, K.R.; Carr, W.N.

doi:10.1109/memsys.1998.659746

Cited by 43 publications

(12 citation statements)

References 8 publications

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“…The advantages of this design strategy are that the switch can remain in its second stable state under zero load, and the required snap-back acceleration can be much lower than that of the snap-through. Sun et al [49] presented a latch-bistable switch using two-segment bimorph actuators. The snap-through motion was implemented by applying a DC voltage to heat the bimorph.…”

Section: Persistent Closed Inertial Micro-switchesmentioning

confidence: 99%

Recent Advancements in Inertial Micro-Switches

et al. 2019

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Inertial micro-switches have great potential in the applications of acceleration sensing, due to the integrated advantages of a small size, high integration level, and low or even no power consumption. This paper presents an overview of the recent advancements made in research on the sensitive direction, threshold acceleration, contact effect, and threshold accuracy of inertial micro-switches. The reviewed switches were categorized according to the performance parameters, including multi-directional switches, multi-threshold switches, persistent closed switches, flexible-electrode switches, and low-g high-threshold-accuracy switches. The current challenges and prospects are also discussed.

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Section: Persistent Closed Inertial Micro-switchesmentioning

confidence: 99%

Recent Advancements in Inertial Micro-Switches

et al. 2019

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“…Doering et al [3] used a bimorph actuator made from epitaxial silicon and aluminium for fluid deflection. Sun et al [4] fabricated a bistable micro-relay based on surface micromachined bimorph actuators. Bimorph actuators have also been used for tilting micromirrors [5,6].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane

Sehr

Evans

Brunnschweiler

et al. 2001

J. Micromech. Microeng.

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We have fabricated thermal actuators based on vertical bimorphs, which consist of silicon beams side-coated with aluminium. When they are heated by an electrical current they bend like a bimetal and produce movement in the wafer plane. The fabrication process is based on silicon-on-insulator substrates and uses standard silicon micromachining techniques combined with a special aluminium sidewall deposition process. The displacement has been measured as a function of the input power and the results have been compared with an FEA-simulation.

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“…The values reported in the table represent the extreme high and low for any relay for each given parameter and does not represent a given relay. Table 4 compares the performance of three representative current microrelays [5,6,11] with those characterized in this paper. The relay in [6] has also been reported to work as a normally closed device [23].…”

Section: Discussionmentioning

confidence: 99%

“…Nearly all of the microrelays developed thus far are nonlatching and normally open [4][5][6][7][8][9][10]. There are some latching relays [11] but these generally require a complex control signal and mechanical design to achieve their latching ability. Mercury microdrops have been demonstrated as latching-type microrelays [12].…”

Section: Introductionmentioning

confidence: 99%

In-plane linear displacement bistable microrelay

Gomm

Howell

Selfridge

2002

J. Micromech. Microeng.

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This paper investigates the Linear Displacement Bistable Mechanism (LDBM) for use in microrelays. The LDBM, thermal actuators, and contacts are integrated to demonstrate a relay design. The performance of the relay is characterized using relay performance metrics, including size (1.92 mm 2), contact force (23.4 µN), switching time (340 µs), breakdown voltage (> 475 V), and isolation (> 235 V). The actuation voltage and current are 11 V and 85 mA, respectively. AC characteristics, including contact-to-contact crosstalk and AC isolation are also measured. The testing results demonstrate that it is feasible to use the LDBM as a microrelay and that it has potential for use in future applications.

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A bistable microrelay based on two-segment multimorph cantilever actuators

Cited by 43 publications

References 8 publications

Recent Advancements in Inertial Micro-Switches

Recent Advancements in Inertial Micro-Switches

Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane

In-plane linear displacement bistable microrelay

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