Surface micromachining of micro-electro-mechanical systems (MEMS), like all other fabrication processes, has inherent variation that leads to uncertain material and dimensional parameters. By considering the effects of these variations during the design of micro force gauges, the gauge uncertainty and reliability can be estimated. Without means of calibrating micro gauges, these effects are often significant when compared to experimental repeatability. The general force gauge model described in this paper can be used to measure a wide range of forces, and simple design changes can lead to improved accuracy in measurement. A method of probabilistic design is described that is not limited to small beam deflections.
This paper investigates the Linear Displacement Bistable Mechanism (LDBM) for use in microrelays. The LDBM, thermal actuators, and contacts are integrated to demonstrate a relay design. The performance of the relay is characterized using relay performance metrics, including size (1.92 mm 2), contact force (23.4 µN), switching time (340 µs), breakdown voltage (> 475 V), and isolation (> 235 V). The actuation voltage and current are 11 V and 85 mA, respectively. AC characteristics, including contact-to-contact crosstalk and AC isolation are also measured. The testing results demonstrate that it is feasible to use the LDBM as a microrelay and that it has potential for use in future applications.
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