TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference 2009
DOI: 10.1109/sensor.2009.5285522
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A bio-inspired, chemo-responsive polymer nanocomposite for mechanically dynamic microsystems

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Cited by 15 publications
(32 citation statements)
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“…Probes for mechanical testing and buckling tests were created from a solution-cast poly (vinyl acetate)-tunicate whisker film compressed to a specified thickness (53 µm for buckling tests, 110 µm for mechanical measurements) and weakly adhered to a bare Si wafer by applying gentle pressure and heating on a hotplate set to 70°C for 3 minutes. Using a direct-write CO 2 laser at a laser power of 0.5 W, speed of 56 mm/s, and a resolution of 1000 pulses per inch (Hess et al , 2009; Hess et al , 2011), microprobes for mechanical testing were fabricated as beams 6 mm in length and 180–210 µm in width. For buckling testing, beams with a tip opening of 30° were cut using the same settings for the laser (3mm in shank length, 125 µm in width, 53 µm thick).…”
Section: Methodsmentioning
confidence: 99%
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“…Probes for mechanical testing and buckling tests were created from a solution-cast poly (vinyl acetate)-tunicate whisker film compressed to a specified thickness (53 µm for buckling tests, 110 µm for mechanical measurements) and weakly adhered to a bare Si wafer by applying gentle pressure and heating on a hotplate set to 70°C for 3 minutes. Using a direct-write CO 2 laser at a laser power of 0.5 W, speed of 56 mm/s, and a resolution of 1000 pulses per inch (Hess et al , 2009; Hess et al , 2011), microprobes for mechanical testing were fabricated as beams 6 mm in length and 180–210 µm in width. For buckling testing, beams with a tip opening of 30° were cut using the same settings for the laser (3mm in shank length, 125 µm in width, 53 µm thick).…”
Section: Methodsmentioning
confidence: 99%
“…Initial material characterization has demonstrated that the polymer nanocomposite reduces its tensile storage modulus from ~5 GPa to 12 MPa within 15 minutes upon exposure to simulated physiological conditions in artificial cerebral spinal fluid (ACSF) at 37°C (Shanmuganathan, 2010; Capadona et al , 2009; Capadona et al , 2008). Additionally, advanced bioMEMS fabrication processes have been developed to create cortical microprobes from this novel material (Hess et al , 2009; Hess et al , 2011). …”
Section: Introductionmentioning
confidence: 99%
“…In a preliminary study investigating these questions, we reported that laser micromachining was an adequate method of producing micro-scale PVAc-TW structures that displayed dynamic mechanical behavior comparable to bulk samples [11]. While a method to pattern the PVAc-TW itself was described, these structures did not include metal or insulator features defined using photolithographic processes.…”
Section: Introductionmentioning
confidence: 99%
“…This is of significant importance to the targeted application as adaptive substrates for intracortical electrodes, where an initial E 0 of >4 GPa is desirable to allow for the insertion of an electrode with typical dimensions into the cortex. 42,43 As shown above, however, the aqueous swelling of the cotton-based materials is massively reduced, which represents a significant advantage over the tunicate-based nanocomposites.…”
mentioning
confidence: 99%