A bidirectional silicon micropump

Zengerle, Roland; Ulrich, Joachim; Kluge, Stefan; Richter, M.; Richter, Α.

doi:10.1016/0924-4247(96)80088-4

Cited by 292 publications

(187 citation statements)

References 7 publications

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“…The success of electrophoresis in microchannels for genomics has been a spectacular example [65]. Investigators have capitalized on continuing innovations in microfabrication to develop individual microfluidic components such as valves and pumps as well as diverse microsensors that operate in microchannels or microwells [57,58,[66][67][68][69][70][71][72][73][74][75][76][77] and several microscale active and passive flow regulators have been described [78][79][80][81].…”

Section: Adaptation For Chronic Perfusionmentioning

confidence: 99%

Inner ear drug delivery via a reciprocating perfusion system in the guinea pig

Chen

Kujawa

McKenna

et al. 2005

Journal of Controlled Release

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Rapid progress in understanding the molecular mechanisms associated with cochlear and auditory nerve degenerative processes offers hope for the development of gene-transfer and molecular approaches to treat these diseases in patients. For therapies based on these discoveries to become clinically useful, it will be necessary to develop safe and reliable mechanisms for the delivery of drugs into the inner ear, bypassing the blood-labyrinthine barrier. Toward the goal of developing an inner ear perfusion device for human use, a reciprocating microfluidic system that allows perfusion of drugs into the cochlear perilymph through a single inlet hole in scala tympani of the basal turn was developed. The performance of a prototype, extracorporeal reciprocating perfusion system in guinea pigs is described. Analysis of the cochlear distribution of compounds after perfusion took advantage of the place-dependent generation of responses to tones along the length of the cochlea. Perfusion with a control artificial perilymph solution had no effect. Two drugs with wellcharacterized effects on cochlear physiology, salicylate (5 mM) and DNQX (6,7-Dinitroquinoxaline-2,3-dione; 100 and 300 μM), reversibly altered responses. The magnitude of drug effect decreased with distance from the perfusion pipette for up to 10 mm, and increased with dose and length of application.

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Section: Adaptation For Chronic Perfusionmentioning

confidence: 99%

Inner ear drug delivery via a reciprocating perfusion system in the guinea pig

Chen

Kujawa

McKenna

et al. 2005

Journal of Controlled Release

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“…Other types of pumps such as piezoelectric diaphragm [6][7][8], capillary pumps [35], electroosmotic pumps [36] and evaporation/condensation bubble pumps [37], have a very wide range of f sp value from 10 influenced by pumping principle rather than package size as also investigated in a past micropump review [4]. In these pumps, the developed pump is just placed in the moderate level not specially high or low.…”

Section: Performance Comparison With Other Micropumps On Chipmentioning

confidence: 99%

“…From the viewpoint of driving source, piezoelectric actuator has been frequently used [6][7][8]. Silicon, metal, or polymer components are the most common materials used in these pumps.…”

Section: Introductionmentioning

confidence: 99%

A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

Tanaka¹

2014

Micromachines

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Lab-on-a-chip technology is promising for the miniaturization of chemistry, biochemistry, and/or biology researchers looking to exploit the advantages of a microspace. To manipulate fluid on a microchip, on-chip pumps are indispensable. To date, there have been several types of on-chip pumps including pneumatic, electroactive, and magnetically driven. However these pumps introduce polymers, metals, and/or silicon to the microchip, and these materials have several disadvantages, including chemical or physical instability, or an inherent optical detection limit. To overcome/avoid these issues, glass has been one of the most commonly utilized materials for the production of multi-purpose integrated chemical systems. However, glass is very rigid, and it is difficult to incorporate pumps onto glass microchips. This paper reports the use of a very flexible, ultra-thin glass sheet (minimum thickness of a few micrometers) to realize a pump installed on an entirely glass-based microchip. The pump is a peristaltic-type, composed of four serial valves sealing a cavity with two penetrate holes using ultra-thin glass sheet. By this pump, an on-chip circulating flow was demonstrated by directly observing fluid flow, visualized via polystyrene tracking particles. The flow rate was proportional to the pumping frequency, with a maximum flow rate of approximately 0.80 μL/min. This on-chip pump could likely be utilized in a wide range of applications which require the stability of a glass microchip.

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“…After the initial work at the University of Twente, other groups optimized [22,23] or modified [24] piezoelectric actuated micropumps and probably the most advanced micropump to date is the bi-directional one presented by Zengerle et al [25]. This pump uses an external piezo-actuator and has a complex, actuation frequency dependent mode of operation which creates bi-directional pumping as a function of frequency.…”

Section: Piezoelectric Actuationmentioning

confidence: 99%

Micro Total Analysis Systems: Microfluidic Aspects, Integration Concept and Applications

Berg

Lammerink

1998

Topics in Current Chemistry

194

102

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In this contribution three aspects of miniaturized total analysis systems (mTAS) are described and discussed in detail. First, an overview of microfabricated components for fluid handling is given. A description of the importance of sampling-and fluid-handling techniques is followed by details of microvalves, micropumps and micro flowchannels. Secondly, the problems associated with system integration are discussed. As a solution for the realization of microfluidic-and micro analysis systems, the concept of a planar mixed circuit board (MCB) as a platform for the integration of different components is described. In addition, the design, modeling and simulation, and realization of several components in the form of standard modules for integration on a MCB is described. As an illustration of the potential of this approach, the realization of a mTAS demonstrator for the optical detection of the pH change of a pH indicator, is presented. Finally, a number of different applications of mTAS are described, such as on-line process monitoring, environmental monitoring, biomedical and space applications and DNA-analysis.

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A bidirectional silicon micropump

Cited by 292 publications

References 7 publications

Inner ear drug delivery via a reciprocating perfusion system in the guinea pig

Inner ear drug delivery via a reciprocating perfusion system in the guinea pig

A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

Micro Total Analysis Systems: Microfluidic Aspects, Integration Concept and Applications

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