A basic study of defect inspection methods for ASIC manufacturing line (Second report: Inspection parameter dependence on yield and cleaning cycle)

Abstract

SUMMARYThe results of strict defect control include both the enhancement of manufacturing yield and increased delivery delay due to a drop in the machine operation rate. Therefore, defect inspection methods must be optimized for this trade-off, especially for ASIC manufacturing. In the first paper, we proposed a new manufacturing model which treats not only inspection and the yield model, but also the workflow model. In this paper, we formulate the inspection parameter dependence on the manufacturing yield and the machine cleaning cycle, which may affect delivery time. By using the resulting formulas, factory engineers can obtain practical information for inspection parameter optimization.