International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)
DOI: 10.1109/iedm.2001.979557
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A 100 nm node CMOS technology for practical SOC application requirement

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Cited by 18 publications
(13 citation statements)
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“…Moreover, the gate tunneling leakage will continue to increase at a much higher rate thus mandating the use of high-k materials other than silicon dioxide to enable the use of thicker oxide thicknesses [18]. For example, NEC's 100 nm process technology has a T ox = 1.6 nm, subthreshold leakage of 0.3 nA/lm, and an NMOS gate tunneling leakage of 0.65 nA/lm [19]. Figure 5 shows the gate tunneling leakage current produced by an SOI NMOS transistor.…”
Section: Gate Tunneling Leakage Currentmentioning
confidence: 98%
“…Moreover, the gate tunneling leakage will continue to increase at a much higher rate thus mandating the use of high-k materials other than silicon dioxide to enable the use of thicker oxide thicknesses [18]. For example, NEC's 100 nm process technology has a T ox = 1.6 nm, subthreshold leakage of 0.3 nA/lm, and an NMOS gate tunneling leakage of 0.65 nA/lm [19]. Figure 5 shows the gate tunneling leakage current produced by an SOI NMOS transistor.…”
Section: Gate Tunneling Leakage Currentmentioning
confidence: 98%
“…However, as technology advances, T ox decreases by 30% with every technology generation, and for T ox smaller than 1.4 nm, I Gate rises by about 1000 X in the following process technology step, while I Sub rises by about 5 X under normal scaling theory [7]. An example: NEC's 100 nm process technology has a T ox = 1.6 nm, I Sub of 0.3 n A/µm of gate width, and an NMOS I Gate of 0.65 n A/µm [8]. So, I Gate has already increased to more than double I Sub in some cases.…”
Section: Leakage Sources In Cmos Circuitsmentioning
confidence: 99%
“…One way to reduce the gate leakage is using high-k dielectrics. There are several high-k materials proposed so far such as oxinitrides (k=4.1) [5], Si 3 N 4 (k=7.8), and HfO 2 (k=25~50) [6]. However, there are many process integration problems with these materials.…”
Section: Introductionmentioning
confidence: 99%