A 10 MHz thin-film piezoelectric-on-silicon MEMS resonator with T-shaped tethers for<i>Q</i>enhancement

Zhang, Yi; Bao, Jingfu; Zhou, Xin; Wu, Zhaohui; Bao, Feihong; Zhang, Xiaosheng

doi:10.7567/1347-4065/ab58b2

Cited by 4 publications

(2 citation statements)

References 40 publications

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“…4` b c d e f Alternatively, α,β-unsaturated carbonyl compounds (Scheme 1b, c ) can be applied as starting substrates. 4g–i However, these methods have a number of disadvantages: the formation of regioisomeric mixtures with respect to substituents in the 3- and 5-positions of pyrazole, and, sometimes, the complexity of the synthesis of starting compounds. Increasing interest in pyrazoles has been reflected by the development of various synthetic methodologies allowing straightforward access to these structural motifs.…”

Section: Table 1 Synthesis Of α-Aryl-α-diazophosphonate...mentioning

confidence: 99%

1,3-Dipolar Cycloaddition of Diazophosphonates with Methyl(Ethyl) Acrylate for the Synthesis of 5-Arylpyrazole-3-carboxylates

Titanyuk,

Zinovyev,

Beletskaya

2024

Synthesis

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A wide range of -aryl--diazophosphonates was easily prepared via modified diazo transfer reaction. Benzylphoshonates reacted with tosyl azide (TsN3) in the presence of potassium tert-butoxide (KOtBu) to afford diazophosphonates in yields up to 93% (generally 70-80%). Aryl-diazophosponates were successfully explored for the synthesis of 5-aryl substituted pyrazol-3-carboxylates in one pot by the 1,3-dipolar cycloaddition with alkyl acrylates followed by NaH treatment. The second stage led to elimination of the diethoxylphosphoryl moiety with the aromatization of cycle.

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Section: Table 1 Synthesis Of α-Aryl-α-diazophosphonate...mentioning

confidence: 99%

1,3-Dipolar Cycloaddition of Diazophosphonates with Methyl(Ethyl) Acrylate for the Synthesis of 5-Arylpyrazole-3-carboxylates

Titanyuk,

Zinovyev,

Beletskaya

2024

Synthesis

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“…The result shows that the proposed structure can increase the quality factor by four times. A quality factor of 4522 was achieved by [41] after adding a T-shaped tether with reflective blocks to the 10 MHz lateral mode resonator. A method to effectively reduce anchor loss by introducing a slot near the tether support end of a lamb-mode piezoelectric resonator was proposed by [42].…”

Section: Anchor Lossmentioning

confidence: 99%

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Feng

Yuan

et al. 2022

Micromachines

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In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

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Biomechanical energy harvesting technologies for wearable electronics: Theories and devices

Li,

Zeng,

et al. 2024

Friction

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Wearable biomechanical energy harvesting devices have received a lot of attention recently, benefiting from the rapid advancement of theories and devices in the field of the micro electromechanical system (MEMS). They not only fulfil the requirements for powering wearable electronic devices but also provide an attractive prospect for powering self-powered flexible electronic devices when wearing. In this article, we provide a review of the theories and devices of biomechanical energy harvesting technology for wearable applications. Three different forms of biomechanical energy harvesting mechanisms, including the piezoelectric effect, electromagnetic effect, and electrostatic effect, are investigated in detail. The fundamental principle of converting other types of energy from the biomechanical environment into electrical energy, as well as the most commonly-used analytical theoretical models, are outlined for each process. Therefore, the features, properties, and applications of energy harvesting devices are summarized. In addition, the coupled multi-effect hybrid energy harvesting devices are listed, showing the various possibilities of biomechanical energy harvesting devices for serving as sources, sensors, and actuators. Finally, we present perspectives on the future trends of biomechanical energy harvesting devices for wearable electronics applications.

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A 10 MHz thin-film piezoelectric-on-silicon MEMS resonator with T-shaped tethers forQenhancement

Cited by 4 publications

References 40 publications

1,3-Dipolar Cycloaddition of Diazophosphonates with Methyl(Ethyl) Acrylate for the Synthesis of 5-Arylpyrazole-3-carboxylates

1,3-Dipolar Cycloaddition of Diazophosphonates with Methyl(Ethyl) Acrylate for the Synthesis of 5-Arylpyrazole-3-carboxylates

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Biomechanical energy harvesting technologies for wearable electronics: Theories and devices

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