2015
DOI: 10.1109/tmtt.2014.2380357
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A 1.3–2.4-GHz 3.1-mW VCO Using Electro-Thermo- Mechanically Tunable Self-Assembled MEMS Inductor on HR Substrate

Abstract: This paper reports implementation and wafer-level testing of a self-assembled tunable microelectromechanical systems (MEMS) inductor with electrostatic, electrothermal, and thermal tuning capability. The surface micromachined inductor was fabricated on a high-resistivity (HR) substrate ( k cm) using a doped polysilicon and Au-Cr metal combination as a bimorph structural layer for providing self-assembled elevation with an enhanced factor. Extensive electro-thermo-mechanical and RF characterization was carried … Show more

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Cited by 8 publications
(2 citation statements)
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“…Another perspective is to change the properties of the magnetic core or the magnetic field distribution in it. Following this direction, researchers tried to control the magnetic flux by thermal actuation [73] or metal shield [74]. DC current was also widely used to modify the properties of magnetic core.…”
Section: A On-chiip Transformer Inductor With Integrated Magnetic Core and Voltage Tunable Inductor With Me Compositementioning
confidence: 99%
“…Another perspective is to change the properties of the magnetic core or the magnetic field distribution in it. Following this direction, researchers tried to control the magnetic flux by thermal actuation [73] or metal shield [74]. DC current was also widely used to modify the properties of magnetic core.…”
Section: A On-chiip Transformer Inductor With Integrated Magnetic Core and Voltage Tunable Inductor With Me Compositementioning
confidence: 99%
“…Several different topologies have been investigated. Two of the most common are cross coupled VCO [5], [7] and balanced Colpitts VCO [8], [9]. A combination of these two have also been proposed, the so-called g m -boosted VCO [10]…”
Section: Introductionmentioning
confidence: 99%