2001
DOI: 10.1039/b105441b
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Abstract: Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) was used to perform depth profile analysis of Ti-based single layers deposited on steel and WC/Co substrates. Ablation parameters adjustable with a commercially available Nd : YAG 266 nm laser, e.g., energy density, frequency and spot size, were optimized to obtain the best depth resolution and high reproducibility of the measured layer thickness. For comparison, a classical calotte grinding technique and glow discharge optical emission sp… Show more

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Cited by 54 publications
(40 citation statements)
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“…Depth profiling can provide a better spatial resolution in the direction of vertical ablation, than it would be possible by lateral scanning of the same features. 129 The depth resolution is hereby dependent on the rate of ablation per laser pulse, and depends on the material analysed in combination with the laser energy, pulse length and repetition rate. 130 Vertical profiling has been successfully applied to abiotic materials 130 and biological tissues.…”
Section: Depth Profiling and Three-dimensional Mappingmentioning
confidence: 99%
“…Depth profiling can provide a better spatial resolution in the direction of vertical ablation, than it would be possible by lateral scanning of the same features. 129 The depth resolution is hereby dependent on the rate of ablation per laser pulse, and depends on the material analysed in combination with the laser energy, pulse length and repetition rate. 130 Vertical profiling has been successfully applied to abiotic materials 130 and biological tissues.…”
Section: Depth Profiling and Three-dimensional Mappingmentioning
confidence: 99%
“…In addition to to the aforementioned general advantages of solid sampling, LA also offers a lateral resolution down to ~5 µm and a depth resolution down to <1 µm [1,2,3,4,5,6]. However, with LA, accurate quantification is not an easy task, especially if no reference material showing a matrix composition similar to the samples to be analysed is available.…”
Section: Introductionmentioning
confidence: 95%
“…Latkoczy et al [14] han desarrollado un sistema simultáneo LIBS-LA-ICP-MS, demostrando la utilidad del sistema para caracterizar cuantitativamente la distribución lateral, en el rango micrométrico, de elementos mayoritarios y trazas en aleaciones multi-fase de magnesio; Coedo et al [15 y 16] cuantifican el aluminio y titanio, soluble y total, en aceros y preparan muestras sintéticas para identificar el tamaño de partícula de las inclusiones de Al 2 O 3 en aceros, encontrando una correlación lineal entre área de pico y tamaño medio de partícula (en el intervalo:25-100µm). Con relación a perfiles en profundidad, Plotnikov et al [17] y Bleiner et al [18] han realizado estudios sobre substratos de acero y WC/Co recubiertos con capas de TiC, TiN, Ti(C,N) y (Ti,Al)N; utilizando un espectrómetro de masas quadrupolo y uno de tiempo de vuelo, respectivamente. Con el quadrupolo obtienen una resolución en profundidad ≤ 25 µm (calculada a partir de las curvas intensidadtiempo), mientras que con el de tiempo de vuelo llegan a una resolución de 0,20 µm por pulso láser.…”
Section: Introductionunclassified