1997
DOI: 10.1023/a:1018657424566
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Cited by 156 publications
(50 citation statements)
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“…A highly transparent ZnO films have been prepared by many different deposition techniques and their corresponding deposition parameters play an important role in controlling the morphology and physical properties of the nanostructures. Both physical deposition, including thermal evaporation, sputtering, spray pyrolysis, metal organic chemical vapor deposition (MOCVD), pulsed laser deposition, molecular beam epitaxy (MBE) [7][8][9][10][11][12][13][14][15], and chemical synthetic routes, including hydrothermal, solvo-thermal, sol-gel, electrochemical, chemical bath deposition [16][17][18][19][20][21][22][23][24][25][26] have been successfully employed to prepare a wide variety of ZnO nanostructures. The physical deposition routes have the advantages of producing high-quality materials, but also the disadvantage of the need for high temperature.…”
Section: Introductionmentioning
confidence: 99%
“…A highly transparent ZnO films have been prepared by many different deposition techniques and their corresponding deposition parameters play an important role in controlling the morphology and physical properties of the nanostructures. Both physical deposition, including thermal evaporation, sputtering, spray pyrolysis, metal organic chemical vapor deposition (MOCVD), pulsed laser deposition, molecular beam epitaxy (MBE) [7][8][9][10][11][12][13][14][15], and chemical synthetic routes, including hydrothermal, solvo-thermal, sol-gel, electrochemical, chemical bath deposition [16][17][18][19][20][21][22][23][24][25][26] have been successfully employed to prepare a wide variety of ZnO nanostructures. The physical deposition routes have the advantages of producing high-quality materials, but also the disadvantage of the need for high temperature.…”
Section: Introductionmentioning
confidence: 99%
“…They have been used as an antiferromagnetic material, 1) p-type transparent conducting films, 2) material for electrochromic display devices 3) and in functional sensor layers for chemical sensors. 4) These films have been fabricated using various physical and chemical vapor deposition techniques, such as spray pyrolysis, 5) plasmaenhanced chemical vapor deposition 6) and reactive sputtering.…”
Section: Introductionmentioning
confidence: 99%
“…4) Furthermore, (100)-and (111)-oriented NiO films can be used as buffer layers that are deposited on oxide films with other orientations, such as c-axis-oriented perovskitetype ferromagnetic films and superconducting films, [5][6][7] because they are chemically stable and the oxygen ion lattice constant of NiO is similar to that of the oriented oxide films. Such films have been fabricated using various physical and chemical vapor deposition techniques, including spray pyrolysis, 8,9) electron beam evaporation, 10) pulsed laser deposition, 11) plasma-enhanced chemical vapor deposition 1,12) and reactive sputtering. 3,13,14) Reactive sputtering is the most widely used among these methods.…”
Section: Introductionmentioning
confidence: 99%