82‐2: Invited Paper: Roll‐to‐Roll Processing of Polysilicon TFTs on Flexible Large Area Stainless Steel Substrates

Abstract

Roll-to-roll (R2R) production of polysilicon CMOS TFTs on steel substrates for electronic devices allows for low-cost and highvolume manufacturing, enabling the Internet of Things (IOT). R2R process capabilities are demonstrated along with key equipment considerations and de-risking approaches for scaling from a sheet-based to roll-based process.