2005
DOI: 10.1889/1.2036346
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59.1: Invited Paper: National FED Project in Japan

Abstract: Japanese government has started a three‐year project on carbon nanotube (CNT) FED in 2003. The feasibility of uniform CNT electron source both by chemical vapor deposition (CVD) method and printing method has been proved. The high‐temperature CVD extended the applicability to fine pitch of 0.2mm. The emitter fabricated by low‐temperature CVD proved to be driven with low voltage. The printing method employs a new etching process of silicone‐ladder polymer insulator combined with laser irradiation surface‐treatm… Show more

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