53.1: Fabrication of CNT Emitter Array with Polymer Insulator

Japanese government has started a three‐year project on carbon nanotube (CNT) FED in 2003. The feasibility of uniform CNT electron source both by chemical vapor deposition (CVD) method and printing method has been proved. The high‐temperature CVD extended the applicability to fine pitch of 0.2mm. The emitter fabricated by low‐temperature CVD proved to be driven with low voltage. The printing method employs a new etching process of silicone‐ladder polymer insulator combined with laser irradiation surface‐treatment. A spacer‐free glass panel structure and a new sealing material applicable under low temperature have been sucessfully applied to test panels.

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“…A process to fabricate triode arrays of a micro-gate hole on a large substrate for CNT-FED has been developed [14] as shown in Fig. 1 (top).…”

Section: Printing Methods and Activation Technologiesmentioning

confidence: 99%

59.1: Invited Paper: National FED Project in Japan

Okuda

Nakata

Shiroishi

et al. 2005

SID Symposium Digest

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Improvement of emission characteristics uniformity of carbon nanotube field emission display by surface treatment

Shiroishi

Hosono

Sono

et al. 2006

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Carbon nanotubes (CNTs) have been investigated as an emitter for field emission display (FED). In our FED fabrication process, the printed CNTs are raised by a laser irradiation for the purpose to improve the emission characteristics. Because the emitters have to be controlled in each pixel individually on FED, the uniformity of the emission characteristics is necessary. We could improve the emission characteristics uniformity successfully by two methods. In the first method, the distribution of CNT raisings was homogenized by the modification of the irradiation pattern that consisted of an array of small areas. The emission deviation was improved to approximately half by the method. In the second method, the impurities of CNT raisings were cleaned by post-laser-irradiation of which fluence was lower than that of first irradiation. The emission characteristics improved and the turn-on electric field reduced from 2.1 to 1.4V∕μm. The emission deviation also improved to approximately half.

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53.1: Fabrication of CNT Emitter Array with Polymer Insulator

Cited by 2 publications

References 4 publications

59.1: Invited Paper: National FED Project in Japan

59.1: Invited Paper: National FED Project in Japan

Improvement of emission characteristics uniformity of carbon nanotube field emission display by surface treatment

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