47.3: Plane Source and In-Line Deposition System for OLED Manufacturing

Abstract

Whether the manufacturing of the large‐size OLED devices succeeds or not will strongly depend on the concept of a thermal evaporation source. The most important factors in OLED device manufacturing are the organic material utilization and the TACT time. We propose an in‐line type equipment for OLED manufacturing using a novel plane evaporation source. The plane source maintains the organic film uniformity at 5% and provides high material utilization of over 60% and the proposed in‐line system can achieve in 1 min. TACT time.

OLED Fabrication by Using a Novel Planar Evaporation Technique

“…The positions measured from the 10 × 10 cm glass substrate are presented in Figure 8. The nonuniformity of the film thickness can be determined using (4). Consider…”

“…Most in use are evaporation systems equipped with a point source. Although the point source provides good film nonuniformity, in case the source-to-substrate distance is sufficiently long, the material utilization rate is known to be much less than 10% [4,5]. The high waste of those expensive organic materials is one major cause of the current high cost in OLEDs manufacturing.…”