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2021
DOI: 10.1016/j.snb.2021.130123
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3D-structured soft bioelectronic devices with crack-free metal patterns

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Cited by 9 publications
(5 citation statements)
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“…The ultrathin parylene coating can cover the porous PDMS surface and serve as an interlayer to alleviate the larger mechanical and thermal mismatch between metal and PDMS and favorable for subsequent OLEDs deposition. [27][28][29] Then small molecule OLEDs were fabricated on the composite substrate by highvacuum thermal evaporation (Figure 1d). After releasing the prestrain, an orderly and uniform wrinkled structure were generated due to the difference of elastic modulus between PDMS (0.36-1.74 MPa) and parylene (2.76 GPa) (Figure 1e).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The ultrathin parylene coating can cover the porous PDMS surface and serve as an interlayer to alleviate the larger mechanical and thermal mismatch between metal and PDMS and favorable for subsequent OLEDs deposition. [27][28][29] Then small molecule OLEDs were fabricated on the composite substrate by highvacuum thermal evaporation (Figure 1d). After releasing the prestrain, an orderly and uniform wrinkled structure were generated due to the difference of elastic modulus between PDMS (0.36-1.74 MPa) and parylene (2.76 GPa) (Figure 1e).…”
Section: Resultsmentioning
confidence: 99%
“…However, when the thickness of parylene film is below 1.5 µm, metallic films on the parylene interlayers would generate micro-wrinkles without forming flat electrode patterns, making the OLED prone to breakdown. [27] Thus, the thickness of 1.5 µm was chosen for wrinkles fabrication. The influence of the multi-layered OLEDs on the wrinkle's formation is negligible in this work, since the period and amplitude of the wrinkles formed on parylene/ PDMS and OLED/parylene/PDMS are quite similar as shown in Figure S4 (Supporting Information).…”
Section: Resultsmentioning
confidence: 99%
“…Recently, a fabrication method for stable metal patterns on a soft PDMS substrate was established using an intermediate parylene C layer, [120] which improved the compatibility of PDMS with microfabrication techniques. [121,122] Various efforts have been made to utilize PDMS substrates for ECoG electrodes. [95,102,104,[123][124][125]…”
Section: Elastic Materialsmentioning
confidence: 99%
“…Besides, there are number of recent studies discussing the peripheral neural interfaces' modification with the employment of multiple materials such as polymers, metals or hybrid designs to substitute silicon-based interfaces which explains the importance of the selection of biomaterials in neuroprosthetics. 42…”
Section: Peripheral Neural Interfacesmentioning
confidence: 99%